Study of structural and optical properties of ZnO films grown by pulsed laser deposition

被引：56

作者：

Lemlikchi, S. ^{[1
]}

Abdelli-Messaci, S. ^{[1
]}

Lafane, S. ^{[1
]}

Kerdja, T. ^{[1
]}

Guittoum, A. ^{[2
]}

Saad, M. ^{[2
]}

机构：

[1] Adv Technol Dev Ctr, Algiers, Algeria

[2] Nucl Res Ctr Algiers, Algiers, Algeria

来源：

APPLIED SURFACE SCIENCE | 2010年 / 256卷 / 18期

关键词：

PLD; ZnO; DRX; Morphology; Texture coefficient; OXYGEN-PRESSURE; ABLATION; NANOSTRUCTURES;

D O I：

10.1016/j.apsusc.2010.03.026

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Wurtzite zinc oxides films (ZnO) were deposited on silicon (0 0 1) and corning glass substrates using the pulsed laser deposition technique. The laser fluence, target-substrate distance, substrate temperature of 300 degrees C were fixed while varying oxygen pressures from 2 to 500 Pa were used. It is observed that the structural properties of ZnO films depend strongly on the oxygen pressure and the substrate nature. The film crystallinity improves with decreasing oxygen pressure. At high oxygen pressure, the films are randomly oriented, whereas, at low oxygen pressures they are well oriented along [0 0 1] axis for Si substrates and along [1 0 3] axis for glass substrates. A honeycomb structure is obtained at low oxygen pressures, whereas microcrystalline structures were obtained at high oxygen pressures. The effect of oxygen pressure on film transparency, band gap E-g and Urbach energies was investigated. Published by Elsevier B.V.

引用

页码：5650 / 5655

页数：6

共 25 条

[1] Fast Imaging of Laser-induced Plasma Emission from a ZnO Target [J].