Fabrication of Pb(ZrTi)O3 thin films by liquid delivery MOCVD using a cocktail source with Pb(DPM)2, Zr(MMP)4 and Ti(MMP)4

Ferroelectric PZT thin films were deposited by liquid delivery MOCVD using a novel cocktail solution. The cocktail solution consisted of Pb(DPM)(2), Zr(MMP)(4) and Ti(MMP)(4) diluted with ECH. This cocktail solution was stable at least 6 months and perfectly vaporized above 270degreesC. The precursors of the constituent of this cocktail solution had close thermal decomposition temperatures. Although the deposited films were crystallized into perovskite PZT phase at the substrate temperatures ranging from 475degreesC to 600degreesC, the only films deposited at the substrate temperature of 550degreesC were crystallized into perovskite PZT single phase. The PZT thin films deposited at the substrate temperature of 550degreesC showed good hysteresis properties with the 2P(r) of 72 muC/cm(2) and the 2E(c) of 144 kV/cm.