Deposition of zirconium carbonitride composite films using ion and electron beams emitted from plasma focus device

Nanocrystalline zirconium carbonitride (ZrCN) composite films were deposited on zirconium substrates for multiple (10, 20, 30,40 and 50) focus shots. X-ray diffraction analysis shows diffraction peaks corresponding to nitrides (ZrN, Zr2N and Zr3N4), carbide (ZrC) and carbonitride (Zr2CN), confirming the formation of ZrCN composite films. The average crystallite size estimated for ZrN (2 0 0) and Zr2CN (1 1 1) planes are found to vary from 10 to 20 nm. Maximum compressive stresses of similar to 3.9 GPa in Zr2N (0 0 2) plane for 30 focus shots and maximum tensile stresses of similar to 6.5 GPa in ZrN (2 0 0) plane for 20 focus shots are observed. Tensile stresses observed in Zr2CN (1 1 1) plane are transformed to compressive stresses for higher (40 and 50) focus shots. Raman analysis reveals the emergence of D and G bands related to carbide phases during the film deposition process. Scanning electron microscope analysis exhibits the nanocrystalline microstructure patterns of the composite films. Microstructure patterns showing agglomerates of 30-300 nm dimensions are also observed. Microhardness values of ZrCN composite films increases with increasing number of focus shots and is equal to 5.6 +/- 0.45 GPa for 10 g imposed load, which is 4.5 times that of the virgin one. (c) 2010 Published by Elsevier B.V.