Coplanar phase shifters based on ferroelectric thin films

被引：14

作者：

Fu, Chunlin ^{[1
]}

Pan, Fusheng

Chen, Hongwei

Feng, Shucheng

Cai, Wei

Yang, Chuanren

机构：

[1] Chongqing Univ Sci & Technol, Sch Met & Mat Engn, Chongqing 400050, Peoples R China

[2] Chongqing Univ, Sch Mat Sci & Engn, Chongqing 630044, Peoples R China

[3] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China

来源：

INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES | 2007年 / 28卷 / 03期

关键词：

phase shifter; thin film; ferroelectric; coplanar waveguide; barium strontium titanate;

D O I：

10.1007/s10762-007-9195-y

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Barium strontium titanate (Ba0.6Sr0.4TiO3, short for BST) thin films were prepared by RF-magnetron sputtering. The dielectric tunability, loss tangent, remanent polarization (2Pr) and coercive electric field (Ec) of the BST films are respectively 29.5%, 0.013, 2.29 mu C/cm(2) and 22.27 kV/cm at 1 kHz and 20 V The designed coplanar waveguide (CPW) phase shifter consists of 56 same sections. It is shown that the fabricated lines of electrodes are smooth and the widths at the tip of bottom electrodes are about 5 mu m. At the central frequency of 28 GHz and a bias voltage of 20 V, the figure of merit is approximately 13 degrees/dB.

引用

页码：229 / 235

页数：7

共 17 条

[1] Integrated ferroelectric millimeter-wave phase shifters with a periodic structure [J].

Buslov, OY ;

Keis, VN ;

Kozyrev, AB ;

Kotel'nikov, IV ;

Kulik, PV .

TECHNICAL PHYSICS, 2005, 50 (09) :1195-1200

[2] The size effect of Ba0.6Sr0.4TiO3 thin films on the ferroelectric properties [J].

Chen, Hongwei ;

Yang, Chuanren ;

Fu, Chunlin ;

Zhao, Li ;

Gao, Zhiqiang .

APPLIED SURFACE SCIENCE, 2006, 252 (12) :4171-4177

[3] Voltage tunable epitaxial PbxSr(1-x)TiO3 films on sapphire by MOCVD:: Nancistructure and microwave properties [J].

Dey, SK ;

Wang, CG ;

Cao, W ;

Bhaskar, S ;

Li, J ;

Subramanyam, G .

JOURNAL OF MATERIALS SCIENCE, 2006, 41 (01) :77-86

[4]

Ding Y. P., 1998, P 1 CHIN INT C HIGH, P489

[5] Model for dielectric nonlinearity of ferroelectrics [J].

Fu, CL ;

Yang, CR ;

Chen, HW ;

Hu, LY .

JOURNAL OF APPLIED PHYSICS, 2005, 97 (03)

[6] Ferroelectric properties of Ba0.6Sr0.4TiO3 thin films with different grain sizes [J].

Fu, CL ;

Yang, CR ;

Chen, HW ;

Hu, LY ;

Wang, YX .

MATERIALS LETTERS, 2005, 59 (2-3) :330-333

[7] Effect of grain size on the electrical properties of (Pb0.72La0.28)Ti0.93O3 thin films grown by pulsed laser deposition [J].

Han, KB ;

Jeon, CH ;

Jhon, HS ;

Lee, SY .

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2002, 5 (2-3) :249-252

[8] Thickness effects on microwave properties of (Ba,Sr)TiO3 films for frequency agile technologies [J].

Kageyama, K. ;

Sakurai, A. ;

Ando, A. ;

Sakabe, Y. .

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2006, 26 (10-11) :1873-1877

[9] High-tunability and low-microwave-loss Ba0.6Sr0.4TiO3 thin films grown on high-resistivity Si substrates using TiO2 buffer layers -: art. no. 212903 [J].

Kim, HS ;

Kim, HG ;

Kim, ID ;

Kim, KB ;

Lee, JC .

APPLIED PHYSICS LETTERS, 2005, 87 (21) :1-3

[10] High-performance low-cost phase-shifter design based on ferroelectric materials technology [J].

Kim, W ;

Iskander, MF ;

Tanaka, C .

ELECTRONICS LETTERS, 2004, 40 (21) :1345-1347

← 1 2 →