Improvement of average laser power and beam divergence of a high pulse repetition frequency excimer laser

被引：7

作者：

Uteza, O

Delaporte, P

Fontaine, B

Forestier, B

Sentis, M

Tassy, I

Truong, JP

机构：

[1] Univ Aix Marseille 1, CNRS, UMR 6594, Inst Rech Phenomenes Hors Equilibre, F-13288 Marseille 9, France

[2] Univ Aix Marseille 2, CNRS, UMR 6594, Inst Rech Phenomenes Hors Equilibre, F-13288 Marseille, France

来源：

APPLIED PHYSICS B-LASERS AND OPTICS | 1998年 / 66卷 / 01期

关键词：

D O I：

10.1007/s003400050353

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate that the insertion of ceramic acoustic dampers within an excimer laser cavity produces a large reduction in the amplitude of the residual pressure fluctuations, hence allowing a strong improvement of average laser power and beam divergence at high pulse repetition frequency. Moreover, this technological solution is easy to implement and economical.

引用

页码：31 / 37

页数：7

共 28 条

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