Optimization of parameters for deposition of In2S3 films by spray pyrolysis using Taguchi method

被引：4
作者：
Elfarrass, S. [1 ,2 ]
Hartiti, B. [1 ]
Ridah, A. [2 ]
Thevenin, P. [3 ]
机构：
[1] Univ Hassan II FSTM, Dept Phys, ANEPMAER Grp, MAC & PM Lab, Mohammadia, Morocco
[2] Univ Hassan II FSB, Dept Phys, LIMAT Lab, Casablanca, Morocco
[3] Univ Lorraine, LMOPS Lab, Metz, France
来源：
MOLECULAR CRYSTALS AND LIQUID CRYSTALS | 2016年 / 628卷 / 01期
关键词：
Indium sulfide; Spray pyrolysis; Texture coefficient; Taguchi method; SULFIDE THIN-FILMS;
D O I：
10.1080/15421406.2015.1137151
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
The aim of this research is to investigate the influence of the experimental conditions on the structural, morphological and optical properties of Indium Sulfide thin films deposition according to the Taguchi analysis method. The films are deposited on a glass substrate by spray pyrolysis a deposition method which is dependent on the concentrations of the precursor (indium and sulfide), the substrate temperature and the duration of the process. These four parameters are the key factors to be optimized in our study in conjunction with the morphological and optical properties of the films thanks to the Taguchi analysis, using a L-9 Orthogonal array.
引用
收藏
页码：139 / 144
页数：6
相关论文
共 9 条
  • [1] Synthesis and Characterization of In2S3 Thin Films Deposited by Chemical Bath Deposition on Polyethylene Naphthalate Substrates
    Castelo-Gonzalez, O. A.
    Santacruz-Ortega, H. C.
    Quevedo-Lopez, M. A.
    Sotelo-Lerma, M.
    [J]. JOURNAL OF ELECTRONIC MATERIALS, 2012, 41 (04) : 695 - 700
  • [2] FAR INFRARED AND RAMAN OPTICAL STUDY OF ALPHA-IN2S3 COMPOUNDS AND BETA-IN2S3 COMPOUNDS
    KAMBAS, K
    SPYRIDELIS, J
    BALKANSKI, M
    [J]. PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1981, 105 (01): : 291 - 296
  • [3] Chemical bath deposition of indium sulphide thin films: preparation and characterization
    Lokhande, CD
    Ennaoui, A
    Patil, PS
    Giersig, M
    Diesner, K
    Muller, M
    Tributsch, H
    [J]. THIN SOLID FILMS, 1999, 340 (1-2) : 18 - 23
  • [4] Studies on structural, optical and electrical properties of indium sulfide thin films
    Mane, RS
    Lokhande, CD
    [J]. MATERIALS CHEMISTRY AND PHYSICS, 2003, 78 (01) : 15 - 17
  • [5] Park S.H., 1996, Robust design and analysis for quality engineering, V1st
  • [6] Taguchi G., 1989, QUALITY ENG PRODUCTI
  • [7] Taguchi G., 1986, INTRO QUALITY ENG DE
  • [8] Optimization of annealing conditions of In2S3 thin films deposited by vacuum thermal evaporation
    Timoumi, A.
    Bouzouita, H.
    Brini, R.
    Kanzari, M.
    Rezig, B.
    [J]. APPLIED SURFACE SCIENCE, 2006, 253 (01) : 306 - 310
  • [9] Design optimization of cutting parameters for turning operations based on the Taguchi method
    Yang, WH
    Tarng, YS
    [J]. JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 1998, 84 (1-3) : 122 - 129
1