Micro Vibration Measurement with Microscopic Speckle Interferometry Based on Orthogonal Phase

被引：2

作者：

Gao, Chenjia ^{[1
]}

Gao, Zhan ^{[1
]}

Niu, Yuhao ^{[1
]}

Wang, Xu ^{[1
]}

Zhao, Jieming ^{[1
]}

Deng, Lin ^{[1
]}

机构：

[1] Beijing Jiaotong Univ, Minist Educ, Key Lab Luminescence & Opt Informat, Beijing 100044, Peoples R China

来源：

APPLIED SCIENCES-BASEL | 2021年 / 11卷 / 11期

基金：

中国国家自然科学基金;

关键词：

micro vibration; real-time; full-field; microscopic speckle interferometry; orthogonal phase; FULL-FIELD INTERFEROMETER; MICHELSON INTERFEROMETER; LASER INTERFEROMETER; SURFACE; AMPLITUDE;

D O I：

10.3390/app11115251

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A micro-device vibration measurement method based on microscopic speckle interferometry combined with orthogonal phase is presented. This method utilizes the approximate linear distribution characteristics of orthogonal points (points satisfying the condition that the initial phase difference equal to pi/2) to quickly obtain the vibration information of the measured object. Compared with common optical measurement methods, this method does not require scanning imaging and can realize real-time full-field measurement. Moreover, the measurement principle and equipment is simple, so there is no need to introduce a stroboscopic light source or heterodyne device.

引用

页数：12

共 22 条

[1] Electronic speckle-pattern interferometer using holographic optical elements for vibration measurements [J].

Bavigadda, Viswanath ;

Jallapuram, Raghavendra ;

Mihaylova, Emilia ;

Toal, Vincent .

OPTICS LETTERS, 2010, 35 (19) :3273-3275

[2] Vibration amplitude range enhancement method for a heterodyne interferometer [J].

Chang, Xinyu ;

Yang, Yuan ;

Lu, Junsheng ;

Hong, Yujian ;

Jia, Yuan ;

Zeng, Yanan ;

Hu, Xiaodong .

OPTICS COMMUNICATIONS, 2020, 466

[3] Wide-field heterodyne interferometric vibrometry for two-dimensional surface vibration measurement [J].

Choi, Samuel ;

Maruyama, Yuta ;

Suzuki, Takamasa ;

Nin, Fumiaki ;

Hibino, Hiroshi ;

Sasaki, Osami .

OPTICS COMMUNICATIONS, 2015, 356 :343-349

[4] Michelson interferometer vibrometer using self-correcting synthetic-heterodyne demodulation [J].

Connelly, Michael J. ;

Galeti, Jose Henrique ;

Kitano, Claudio .

APPLIED OPTICS, 2015, 54 (18) :5734-5738

[5] Vibration measurement based on electronic speckle pattern interferometry and radial basis function [J].

Dai, Xiangjun ;

Shao, Xinxing ;

Geng, Zhencen ;

Yang, Fujun ;

Jiang, Yijun ;

He, Xiaoyuan .

OPTICS COMMUNICATIONS, 2015, 355 :33-43

[6] Modified Mach-Zender laser interferometer for probing bulk acoustic waves [J].

Fattinger, GG ;

Tikka, PT .

APPLIED PHYSICS LETTERS, 2001, 79 (03) :290-292

[7] Real-time imaging of acoustic waves on a bulk acoustic resonator [J].

Fujikura, Takashi ;

Matsuda, Osamu ;

Profunser, Dieter M. ;

Wright, Oliver B. ;

Masson, Jeremy ;

Ballandras, Sylvain .

APPLIED PHYSICS LETTERS, 2008, 93 (26)

[8] Dynamic visualization of subangstrom high-frequency surface vibrations [J].

Graebner, JE ;

Barber, BP ;

Gammel, PL ;

Greywall, DS ;

Gopani, S .

APPLIED PHYSICS LETTERS, 2001, 78 (02) :159-161

[9] Stroboscopic supercontinuum white-light interferometer for MEMS characterization [J].

Hanhijarvi, K. ;

Kassamakov, I. ;

Heikkinen, V. ;

Aaltonen, J. ;

Sainiemi, L. ;

Grigoras, K. ;

Franssila, S. ;

Haeggstrom, E. .

OPTICS LETTERS, 2012, 37 (10) :1703-1705

[10] Scanning Michelson interferometer for imaging surface acoustic wave fields [J].

Knuuttila, JV ;

Tikka, PT ;

Salomaa, MM .

OPTICS LETTERS, 2000, 25 (09) :613-615

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