Programmable deep-UV laser platform for inspection and metrology

被引：4

作者：

Miyata, Kentaro ^{[1
]}

Mohara, Mizuki ^{[2
]}

Shimura, Kei ^{[2
]}

Tanabashi, Akihiro ^{[1
]}

Desbiens, Louis ^{[3
]}

Roy, Vincent ^{[3
]}

Taillon, Yves ^{[3
]}

Nakayama, Shinichi ^{[4
]}

Wada, Satoshi ^{[1
]}

机构：

[1] RIKEN Ctr Adv Photon, 2-1 Hirosawa, Wako, Saitama 3510198, Japan

[2] Hitachi High Technol Corp, 882 Ichige, Hitachinaka, Ibaraki 3128504, Japan

[3] INO, 2740 Rue Einstein, Quebec City, PQ G1P 4S4, Canada

[4] Megaopto Co Ltd, 2-3-13 Minami, Wako, Saitama 3510104, Japan

来源：

OPTICS LETTERS | 2019年 / 44卷 / 22期

关键词：

ULTRAVIOLET LASER; COHERENT-LIGHT; SOLID-STATE; GENERATION;

D O I：

10.1364/OL.44.005618

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This Letter reports on a high-power, narrow-linewidth deep-UV laser platform built upon a frequency-quintupled, Yb-fiber master-oscillator and power-amplifier system. The source, emitting at a pulse repetition rate of 120 MHz with a linewidth of 90 GHz and beam quality of M-X/Y(2)similar to 2.1/1.5, has been stably maintained over two weeks by successively changing positions and temperatures of nonlinear crystals in parallel, while outputting a 0.5-W average power at 213 nm. (C) 2019 Optical Society of America

引用

页码：5618 / 5621

页数：4

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