共 6 条
[1]
KINBARA A, 1986, METAL SURF TECHNOL, V37, P469
[2]
NIHEI Y, 1987, ANALYSIS, V12, P837
[3]
Takakura Y., 1997, Transactions of the Institute of Electrical Engineers of Japan, Part A, V117-A, P263
[4]
TAKAKURA Y, 1994, IEEE JAPAN A, V114, P579
[5]
TEII S, 1986, BASIC PLASMA ENG, P232
[6]
WRIGHT AN, 1968, ACTIVE NITROGEN