[1] Tampere Univ Technol, Dept Chem & Bioengn, POB 541, FI-33101 Tampere, Finland
[2] Yildiz Tekn Univ, Dept Environm Engn, Davutpasa Campus, TR-34220 Istanbul, Turkey
[3] Univ Freiburg, IMTEK Dept Microsyst Engn, Lab MEMS Applicat, Georges Kohler Allee 103, D-79110 Freiburg, Germany
[4] Univ Cassino & Southern Lazio, Dept Civil & Mech Engn, Via Biasio 43, I-03043 Cassino, Italy