Reconstruction dependence of the etching and passivation of the GaAs(001) surface

被引:5
|
作者
Tereshchenko, O. E. [1 ,2 ]
Eremeev, S. V. [3 ,4 ]
Bakulin, A. V. [4 ]
Kulkova, S. E. [3 ,4 ]
机构
[1] Russian Acad Sci, Inst Semicond Phys, Siberian Branch, Novosibirsk 630090, Russia
[2] Novosibirsk State Univ, Novosibirsk 630090, Russia
[3] Russian Acad Sci, Inst Strength Phys & Mat Sci, Siberian Branch, Tomsk 634021, Russia
[4] Tomsk State Univ, Tomsk 634050, Russia
基金
俄罗斯基础研究基金会;
关键词
ADSORPTION;
D O I
10.1134/S0021364010090079
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The microscopic nature of the selective interaction of iodine with an As- and Ga-stabilized GaAs(001) surface has been investigated by the photoelectron emission and ab initio calculations. The adsorption of iodine on the Ga-stabilized (4 x 2)/c(8 x 2) surface leads to the formation of the prevailing chemical bond with gallium atoms; to a significant redistribution of the electron density between the surface Ga and As atoms; and, as a result, to a decrease in their binding energy. Iodine on the As-stabilized (2 x 4)/c(2 x 8) surface forms a bond predominantly with surface arsenic atoms. Such a selective interaction of iodine with the reconstructed surfaces gives rise to the etching of the Ga-stabilized surface and the passivation of the As-stabilized surface; this explains the layer-by-layer ("digital") etching of GaAs(001) controlled by the reconstruction transitions on this surface.
引用
收藏
页码:466 / 470
页数:5
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