Analysis of method for measuring thickness of plane-parallel plates and lenses using chromatic confocal sensor

被引：78

作者：

Miks, Antonin ^{[1
]}

Novak, Jiri ^{[1
]}

Novak, Pavel ^{[1
]}

机构：

[1] Czech Tech Univ, Fac Civil Engn, Dept Phys, Prague 16629, Czech Republic

来源：

APPLIED OPTICS | 2010年 / 49卷 / 17期

关键词：

DISTANCE-SENSOR; MICROSCOPY;

D O I：

10.1364/AO.49.003259

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Noncontact optical metrology based on the chromatic confocal principle is becoming increasingly important for fast and accurate measurements of surface topography, distance, and layer thickness in engineering and industry. These sensors are based on the wavelength dependence of longitudinal chromatic aberration of optical systems, and the distance or thickness of the measured sample is coded into spectral information. We provide a theoretical analysis of a problem of the thickness measurement of transparent samples (glass plane-parallel plates or lenses) with respect to material dispersion. Our work deals with a description and analysis of induced measurement errors in the cases of measurement of the thickness of a plane-parallel plate and the central thickness of a lens. Relations are derived for a quantitative evaluation of these errors and a method is presented for minimizing the influence of these errors on the accuracy of measurement. (C) 2010 Optical Society of America

引用

页码：3259 / 3264

页数：6

共 25 条

[1]

Born M., 2000, PRINCIPLES OPTICS

[2] CONFOCAL SURFACE PROFILING UTILIZING CHROMATIC ABERRATION [J].

BROWNE, MA ;

AKINYEMI, O ;

BOYDE, A .

SCANNING, 1992, 14 (03) :145-153

[3] Nontranslational three-dimensional profilometry by chromatic confocal microscopy with dynamically configurable micromirror scanning [J].

Cha, SD ;

Lin, PC ;

Zhu, LJ ;

Sun, PC ;

Fainman, Y .

APPLIED OPTICS, 2000, 39 (16) :2605-2613

[4] Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope [J].

Chun, Byung Seon ;

Kim, Kwangsoo ;

Gweon, Daegab .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2009, 80 (07)

[5] Diffractive lenses for chromatic confocal imaging [J].

Dobson, SL ;

Sun, PC ;

Fainman, Y .

APPLIED OPTICS, 1997, 36 (20) :4744-4748

[6] Chromatic confocal microscopy by means of continuum light generated through a standard single-mode fibre [J].

Garzón, J ;

Meneses, J ;

Tribillon, G ;

Gharbi, T ;

Plata, A .

JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS, 2004, 6 (06) :544-548

[7] Real time determination of the optical thickness and topography of tissues by chromatic confocal microscopy [J].

Garzon, Johnson ;

Gharbi, Tijani ;

Meneses, Jaime .

JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS, 2008, 10 (10)

[8]

Herzberger M., 1980, Modern Geometrical Optics

[9]

Kunkel M, 2005, GLASS SCI TECHNOL, V78, P245

[10] Microvalve thickness and topography measurements in microfluidic devices by white-light confocal microscopy [J].

Li, Shiguang ;

Thorsen, Todd ;

Xu, Zhiguang ;

Fang, Zhong Ping ;

Zhao, Jianhong ;

Yoon, Soon Fatt .

APPLIED OPTICS, 2009, 48 (27) :5088-5094

← 1 2 3 →