Characteristics of transverse volume discharge in Cf2Cl2 and in Ar/Cf2Cl2 mixture

被引:1
作者
Shuaibov, AK [1 ]
Shimon, LL [1 ]
Dashchenko, AI [1 ]
Shevera, IV [1 ]
机构
[1] Uzhgorod State Univ, UA-294000 Uzhgorod, Ukraine
关键词
Radiation Spectrum; Microwave Discharge; CF2Cl2; Transverse Discharge; Voltage Oscillogram;
D O I
10.1007/BF02755992
中图分类号
O59 [应用物理学];
学科分类号
摘要
The conditions of ignition and the characteristics are given for a nanosecond transverse volume discharge in Freon-12 (CF2Cl2) and in an Ar/CF2Cl2 mixture. It is shown that, in the ultraviolet and visible ultraviolet spectral region, a plasma based on CF2Cl2 molecules is a source of radiation of excited carbon atoms and Cl-2 molecules. The volumetric stage of the discharge exists at U-charge less than or equal to 12 kV and [CF2Cl2] = 0.1-3 kPa, and the current and voltage oscillograms are similar to the respective characteristics of a transverse discharge with prior-to-prebreakdown electron multiplication in He(Ne)/SF6(F-2) mixtures. A plasma of an Ar/CF2Cl2 mixture is a source of radiation of the lambda = 258 nm bands for Cl-2* 193 nm for ArF, and 175 nm for ArCl. Such sources may be used in short-wave pulse photometry, microelectronics, and photo- and biochemistry.
引用
收藏
页码:363 / 366
页数:4
相关论文
empty
未找到相关数据