Pulsed-laser-arc deposition of diamond like carbon films

被引：0
|
作者：
Jiang, NN [1 ]
Shao, TM [1 ]
Chen, DR [1 ]
机构：
[1] Tsinghua Univ, State Key Lab Tribol, Beijing 100084, Peoples R China
来源：
JOURNAL OF INORGANIC MATERIALS | 2005年 / 20卷 / 01期
关键词：
pulsed-laser-arc; diamond like carbon film; laser raman spectroscopy; friction coefficient;
D O I：
暂无
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Pulsed-laser-arc deposition technique was introduced. Diamond like carbon (DLC) films were deposited on Si<111> and Si<100> respectively. Results of laser raman spectroscopy showed that the as-deposit films were amorphous, having obvious sp(3) structure. Meanwhile, surface topography and micro-tribological character were investigated by using atomic force microscope and nano-scratch tester. The results show that the surface microstructure and micro-tribological character of the film deposited on Si<100> is better than that deposited on Si<111>. The average friction coefficient of the film on Si<100> is 0.036.
引用
收藏
页码：187 / 192
页数：6
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