Deep traps at GaAs/GaAs interface grown by MBE-interruption growth technique

被引:14
作者
Kaniewska, M.
Engstroem, O.
机构
[1] Inst Electr Mat Technol, Dept Anal Semicond Nanostruct, PL-02668 Warsaw, Poland
[2] Chalmers Univ Technol, Dept Microtechnol & Nanosci, SE-41296 Gothenburg, Sweden
来源
MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS | 2007年 / 27卷 / 5-8期
关键词
MBE-GaAs/GaAs growth-interrupted interface; defects; DLTS; C-V profiling;
D O I
10.1016/j.msec.2006.09.012
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Electron trapping centers at the GaAs/GaAs interface grown by molecular beam epitaxy (MBE)-interruption growth technique have been studied by capacitance versus voltage (C-V) measurements and deep level transient spectroscopy (DLTS). Two main electron traps have been revealed with activation energies at 0.16 eV and 0.52 eV from the conduction band. Inhomogeneous spatial distributions of the traps, obtained by DLTS profiling, indicate that they are agglomerated at the interrupted interface on a concentration level of (2-3) x 10(15) cm(-3) at their maximum. Their behaviour is typical of acceptor-like traps when investigating by C V profiling as a function of temperature. Based on a comparison made with electron traps in MBE-GaAs as well as with the traps in InAs/GaAs quantum dot/quantum well (QD/QW) structures, we conclude they are the well-known EL10 and EL4 defects, respectively, and their concentrations are growth condition dependent. They may be point defect-impulity complexes. Their presence may cause interpretation and application problems of the low-dimensional InAs/GaAs structures. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:1069 / 1073
页数:5
相关论文
共 16 条
[1]   INVESTIGATION OF THE INTERFACE REGION PRODUCED BY MOLECULAR-BEAM EPITAXIAL REGROWTH [J].
BISWAS, D ;
BERGER, PR ;
DAS, U ;
OH, JE ;
BHATTACHARYA, PK .
JOURNAL OF ELECTRONIC MATERIALS, 1989, 18 (02) :137-142
[2]   Effect of fill-pulse parameters on deep-level transient spectroscopy peaks in highly doped p-type InP [J].
Darwich, R ;
Massarani, B .
JOURNAL OF APPLIED PHYSICS, 2000, 88 (02) :794-799
[3]   Electron capture cross sections of InAs/GaAs quantum dots [J].
Engström, O ;
Kaniewska, M ;
Fu, Y ;
Piscator, J ;
Malmkvist, M .
APPLIED PHYSICS LETTERS, 2004, 85 (14) :2908-2910
[4]   Thermal emission of electrons from selected s-shell configurations in InAs/GaAs quantum dots [J].
Engström, O ;
Malmkvist, M ;
Fu, Y ;
Olafsson, HO ;
Sveinbjörnsson, EO .
APPLIED PHYSICS LETTERS, 2003, 83 (17) :3578-3580
[5]  
ENGSTROM O, UNPUB J APPL PHYS
[6]   INFLUENCE OF DEBYE LENGTH ON C-V MEASUREMENTS OF DOPING PROFILES [J].
JOHNSON, WC ;
PANOUSIS, PT .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1971, ED18 (10) :965-&
[7]   Electrical activity of deep levels in the presence of InAs/GaAs quantum dots [J].
Kaniewska, M. ;
Engstrom, O. ;
Barcz, A. ;
Pacholak-Cybulska, M. .
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2006, 9 (1-3) :36-40
[8]  
KANIEWSKA M, 2006, IN PRESS PHYS STATUS
[9]   Electron escape from InAs quantum dots [J].
Kapteyn, CMA ;
Heinrichsdorff, F ;
Stier, O ;
Heitz, R ;
Grundmann, M ;
Zakharov, ND ;
Bimberg, D ;
Werner, P .
PHYSICAL REVIEW B, 1999, 60 (20) :14265-14268
[10]   INFLUENCE OF DEEP TRAPS ON MEASUREMENT OF FREE-CARRIER DISTRIBUTIONS IN SEMICONDUCTORS BY JUNCTION CAPACITANCE TECHNIQUES [J].
KIMERLING, LC .
JOURNAL OF APPLIED PHYSICS, 1974, 45 (04) :1839-1845