Development and application of a fast solid-state potentiometric CO2-Sensor in thick-film technology

被引:2
作者
Wiegaertner, Sven [1 ]
Kita, Jaroslaw [1 ]
Hagen, Gunter [1 ]
Schmaus, Christa [2 ]
Kiessig, Andre [2 ]
Glaser, Eckard [3 ]
Bolz, Armin [3 ]
Moos, Ralf [1 ]
机构
[1] Univ Bayreuth, Dept Funct Mat, POB 101251, D-95447 Bayreuth, Germany
[2] Siegert Elect GmbH, D-90556 Cadolzburg, Germany
[3] Corsci GmbH & Co KG, D-91052 Erlangen, Germany
来源
28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014) | 2014年 / 87卷
关键词
CO2; sensor; nernstian behavior; Nasicon; potentiometric gas sensor; ELECTROCHEMICAL GAS SENSORS; CARBON-DIOXIDE SENSOR; ELECTRODE;
D O I
10.1016/j.proeng.2014.11.337
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A solid-state potentiometric CO2 sensor of the type CO2, O-2, Au, Li2CO3-BaCO3 vertical bar Nasicon vertical bar Na2Ti6O13-TiO2, Au, O-2, CO2 was fully manufactured in planar thick-film technology. On the rear side of the sensor substrate an integrated heater is applied. Thus, it is possible to operate the sensor as a stand-alone device. On the one hand, based on the special meander structure of the heater, a homogeneous temperature distribution on the sensor side can be obtained. And on the other hand, it is possible to operate the sensor with the ideal working temperature of 525 degrees C. At this temperature, the sensor signal follows the theoretical considerations and responds to the Nernst equation. That way, it is possible to use the sensor in different applications, for example to detect the CO2 concentration of human breathing air or to monitor the air quality in closed rooms. (C) 2014 The Authors. Published
引用
收藏
页码:1031 / 1034
页数:4
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