Isotopically controlled self-assembled Ge/Si nanostructures

被引:2
作者
Moutanabbir, O. [1 ]
Miyamoto, S. [1 ]
Fujimoto, A. [1 ]
Itoh, K. M. [1 ]
机构
[1] Keio Univ, Dept Appl Phys & Phys Informat, Kohoku Ku, Yokohama, Kanagawa 2238522, Japan
关键词
nanostructures; molecular beam epitaxy; germanium silicon alloys;
D O I
10.1016/j.jcrysgro.2006.11.178
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
By combining Raman scattering and stable Ge isotopes tracing, we present a new analytical procedure to address the stability of 2D Stranski-Krastanov WL during 3D transition. Our approach is based on the experimentally verified fact that WL has no clear Raman modes and on the dependency of phonon frequencies on the isotopic composition. A direct quantification of the amount of material transferred from WL to 3D islands was achieved for Ge epitaxy on HF-etched Si(0 0 1). The estimated isotopic abundance suggests an exchange process between WL atoms and Ge atoms from direct flux during the growth of island. The influence of surface preparation on islands morphology is also investigated. We found that the growth on HF-etched Si(0 0 1) induces a low density of large dome-like islands. Carbon contaminants seem to play a critical role in self-assembling of Ge islands on hydrophobic Si(0 0 1) surface. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:324 / 329
页数:6
相关论文
共 18 条
[1]  
[Anonymous], SITZUNGSBER AK 2B MN
[2]   Analysis of strain and intermixing in single-layer Ge/Si quantum dots using polarized Raman spectroscopy [J].
Baranov, AV ;
Fedorov, AV ;
Perova, TS ;
Moore, RA ;
Yam, V ;
Bouchier, D ;
Le Thanh, V ;
Berwick, K .
PHYSICAL REVIEW B, 2006, 73 (07)
[3]   Ge dots and nanostructures grown epitaxially on Si [J].
Baribeau, JM ;
Wu, X ;
Rowell, NL ;
Lockwood, DJ .
JOURNAL OF PHYSICS-CONDENSED MATTER, 2006, 18 (08) :R139-R174
[4]   Influence of Si interdiffusion on carbon-induced growth of Ge quantum dots:: a strategy for tuning island density [J].
Bernardi, A. ;
Osso, J. O. ;
Alonso, M. I. ;
Goni, A. R. ;
Garriga, M. .
NANOTECHNOLOGY, 2006, 17 (10) :2602-2608
[5]  
Bimberg D., 1999, QUANTUM DOT HETEROST
[6]   Si/Ge nanostructures [J].
Brunner, K .
REPORTS ON PROGRESS IN PHYSICS, 2002, 65 (01) :27-72
[7]   Isotope effects on the optical spectra of semiconductors [J].
Cardona, M ;
Thewalt, MLW .
REVIEWS OF MODERN PHYSICS, 2005, 77 (04) :1173-1224
[8]   LOW-TEMPERATURE SURFACE CLEANING OF SILICON AND ITS APPLICATION TO SILICON MBE [J].
ISHIZAKA, A ;
SHIRAKI, Y .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (04) :666-671
[9]   HYDROCARBON REACTION WITH HF-CLEANED SI(100) AND EFFECTS ON METAL-OXIDE-SEMICONDUCTOR DEVICE QUALITY [J].
KASI, SR ;
LIEHR, M ;
THIRY, PA ;
DALLAPORTA, H ;
OFFENBERG, M .
APPLIED PHYSICS LETTERS, 1991, 59 (01) :108-110
[10]   MONTE-CARLO STUDIES OF TERNARY SEMICONDUCTOR ALLOYS - APPLICATION TO THE SI1-X-YGEXCY SYSTEM [J].
KELIRES, PC .
PHYSICAL REVIEW LETTERS, 1995, 75 (06) :1114-1117