Open-faced Z-shaped channel-cut x-ray monochromator

被引:9
作者
Khachatryan, R [1 ]
Tkachuk, A [1 ]
Chu, YS [1 ]
Qian, J [1 ]
Macrander, A [1 ]
机构
[1] Argonne Natl Lab, Adv Photon Source, Argonne, IL 60439 USA
来源
X-RAY SOURCES AND OPTICS | 2004年 / 5537卷
关键词
polished channel-cut monochromator; silicon; high-resolution x-ray topography;
D O I
10.1117/12.562377
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Channel-cut monochromators can be easily incorporated in high-resolution image techniques. However, polishing on the inner diffracting surfaces is difficult because of blockage by the opposite face. To address this difficulty, an open-faced monolithic monochromator has been designed, produced and tested using x-rays at the Advanced Photon Source (APS). The open-faced channel cut has a "Z"-shape geometry with a hole in the mid section to allow passage of the diffracted beam. The open geometry allowed chemical mechanical polishing so that an optically smooth finish on both surfaces was achieved. The high-resolution x-ray imaging and topography measurements revealed that the new design introduces significantly less distortions in the phase-contrast images compared with conventional channel-cut monochromators produced using etching alone.
引用
收藏
页码:171 / 176
页数:6
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