Damage accumulation in ion-irradiated ceramics

被引:45
作者
Jagielski, Jacek
Thome, Lionel
机构
[1] Inst Elect Mat Technol, PL-01919 Warsaw, Poland
[2] Soltan Inst Nucl Studies, PL-05400 Otwock, Poland
[3] Ctr Univ Paris Sud, CNRS, IN2P3Ctr Spectrometry Nucl & Spectrometry Masse, F-91405 Orsay, France
关键词
amorphization; crystals; models; irradiation;
D O I
10.1016/j.vacuum.2007.01.059
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The radiation damage induced by energetic ions is one of the basic problems related to ion implantation technology. Each incoming ion creates a huge number of defects, so that high irradiation fluences eventually lead to complete amorphization of the material. Despite the obvious importance of this process, theoretical descriptions of the kinetics of radiation damage accumulation are still incomplete and limited to single-step processes only. In the present paper, we propose a new approach for the description of the radiation damage build-up in crystals, which is based on the concept of subsequent destabilization of the crystalline phases. We compare the presented model to experimental results of damage accumulation kinetics measured for SiC, ZrO(2) and MgAl(2)O(4), i.e. cases when one, two or three stages of defects accumulation were observed. (c) 2007 Elsevier Ltd. All rights reserved.
引用
收藏
页码:1352 / 1356
页数:5
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