Preparation of TiO2 nonparticle thin film with sol-gel process

被引:6
|
作者
Shen, J [1 ]
Weng, ZN [1 ]
Zhang, YL [1 ]
Deng, ZS [1 ]
Yang, TH [1 ]
Wang, J [1 ]
Chen, LY [1 ]
机构
[1] Tongji Univ, Pohl Inst Solid State Phys, Shanghai 200092, Peoples R China
来源
THIRD INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS | 1998年 / 3175卷
关键词
thin film; sol-gel process; spin coating; nanoparticle; refractive index;
D O I
10.1117/12.300677
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
TiO2 nanoparticle thin films are fabricated via sol-gel process followed by dip and spill coating technique, using Ti(OC4H9)(4) as raw material. A complexing agent is used in order to form a stable sol, Experiments show that the colloidal particles in the sols are relatively large under basic catalyst conditions, while under acidic conditions, the colloidal particles are only about several nanometers. The properties and structures of the films are studied. The films are normally homogeneous and crack-free. TEM shows that the films are composed of nanoparticles with a certain porosity. Under the thermal treatment of 80 degrees C, the porosity and thickness of the film decrease while the refractive index increases from the original 1.70 to the final 1.89. When the temperature of the thermal treatment goes up, the size of the nanoparticles increases and crystallization occurs.
引用
收藏
页码:240 / 243
页数:4
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