Advances in ultrasensitive piezoresistive sensors: from conventional to flexible and stretchable applications

被引:107
作者
Nguyen, Thanh [1 ,2 ,3 ]
Dinh, Toan [1 ,2 ,3 ]
Phan, Hoang-Phuong [1 ]
Pham, Tuan Anh [1 ]
Dau, Van Thanh [4 ]
Nguyen, Nam-Trung [1 ]
Dao, Dzung Viet [1 ,4 ]
机构
[1] Griffith Univ, Queensland Micro & Nanotechnol Ctr, Griffith, NSW, Australia
[2] Univ Southern Queensland, Sch Mech & Elect Engn, Darling Hts, Qld, Australia
[3] Univ Southern Queensland, Ctr Future Mat, Darling Hts, Qld, Australia
[4] Griffith Univ, Sch Engn & Built Environm, Griffith, NSW, Australia
基金
澳大利亚研究理事会;
关键词
OPTIMUM DESIGN CONSIDERATIONS; PIEZOTRONIC STRAIN SENSORS; SILICON INVERSION-LAYERS; PRESSURE SENSOR; GIANT PIEZORESISTANCE; ELECTRONIC-STRUCTURE; 3C-SIC NANOWIRES; RAPID-RESPONSE; 1/F NOISE; GRAPHENE;
D O I
10.1039/d1mh00538c
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The piezoresistive effect has been a dominant mechanical sensing principle that has been widely employed in a range of sensing applications. This transducing concept still receives great attention because of the huge demand for developing small, low-cost, and high-performance sensing devices. Many researchers have extensively explored new methods to enhance the piezoresistive effect and to make sensors more and more sensitive. Many interesting phenomena and mechanisms to enhance the sensitivity have been discovered. Numerous review papers on the piezoresistive effect have been published; however, there is no comprehensive review article that thoroughly analyses methods and approaches to enhance the piezoresistive effect. This paper comprehensively reviews and presents all the advanced enhancement methods ranging from the quantum physical effect and new materials to nanoscopic and macroscopic structures, and from conventional rigid to flexible, stretchable and wearable applications. In addition, the paper summarises results recently achieved on applying the above-mentioned innovative sensing enhancement techniques in making extremely sensitive piezoresistive transducers.
引用
收藏
页码:2123 / 2150
页数:29
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