The influence of pressure on the structure and the self-cleaning properties of sputter deposited TiO2 layers

被引：27

作者：

Toelke, Tina ^{[1
]}

Kriltz, Antje ^{[2
]}

Rechtenbach, Annett ^{[1
]}

机构：

[1] Innovent eV, Dept Surface Engn, D-07745 Jena, Germany

[2] Univ Jena, Fac Chem & Earth Sci, Inst Phys Chem, D-07743 Jena, Germany

来源：

THIN SOLID FILMS | 2010年 / 518卷 / 15期

关键词：

Titanium oxide; Fourier transform infrared spectroscopy (FTIR); X-ray diffraction (XRD); Photocatalysis; Hydrophilicity; Sputtering; PHOTOCATALYTIC ACTIVITY; THIN-FILMS; HYDROPHILICITY; CRYSTALLINITY; CONVERSION;

D O I：

10.1016/j.tsf.2009.12.091

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

TiO2-layers for self-cleaning applications were deposited on glass and silicon wafer by reactive dc-sputtering at various oxygen and argon pressures in the range from 0.18 Pa to 3.0 Pa. With an increasing sputtering pressure the microstructure of the resulting films is significantly modified. The deposited crystal phases change from rutile to anatase and the density and the refractive index decrease by a factor of about 1.3. The microstructure of the layers is strongly influenced by the sputtering pressure. An improvement of the hydrophilicity as well as of the photocatalytic activity can be observed, due to the changes in the structure of the layers. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：4242 / 4246

页数：5

共 35 条

[1] State of the art and perspectives on materials and applications of photocatalysis over TiO2 [J].

Agrios, AG ;

Pichat, P .

JOURNAL OF APPLIED ELECTROCHEMISTRY, 2005, 35 (7-8) :655-663

[2]

Ammerlaan J. A. M., 2000, International Patent, Patent No. [WO 00/75087 A1, 0075087]

[3] Effect of microstructure and crystallinity on the photocatalytic activity of TiO2 thin films deposited by dc magnetron sputtering [J].

Eufinger, K. ;

Poelman, D. ;

Poelman, H. ;

De Gryse, R. ;

Marin, G. B. .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2007, 40 (17) :5232-5238

[4] The effect of argon pressure on the structural and photocatalytic characteristics of TiO2 thin films deposited by d.c. magnetron sputtering [J].

Eufinger, K. ;

Janssen, E. N. ;

Poelman, H. ;

Poelman, D. ;

De Gryse, R. ;

Marin, G. B. .

THIN SOLID FILMS, 2006, 515 (02) :425-429

[5] TEMPERATURE-DEPENDENCE OF TRANSVERSE-OPTIC AND LONGITUDINAL-OPTIC MODES IN TIO2 (RUTILE) [J].

GERVAIS, F ;

PIRIOU, B .

PHYSICAL REVIEW B, 1974, 10 (04) :1642-1654

[6] Infrared reflectivity and lattice fundamentals in anatase TiO2 [J].

Gonzalez, RJ ;

Zallen, R ;

Berger, H .

PHYSICAL REVIEW B, 1997, 55 (11) :7014-7017

[7] Infrared study of laser synthesized anatase TiO2 nanopowders [J].

Grujic-Brojcin, M ;

Scepanovic, MJ ;

Dohcevic-Mitrovic, ZD ;

Hinic, I ;

Matovic, B ;

Stanisic, G ;

Popovic, ZV .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2005, 38 (09) :1415-1420

[8] Relationship between photocatalytic activity, hydrophilicity and self-cleaning effect of TiO2/SiO2 films [J].

Guan, KH .

SURFACE & COATINGS TECHNOLOGY, 2005, 191 (2-3) :155-160

[9] Photocatalytically active thin films on float glass with enhanced hydrophilicity and transmission for photovoltaic applications [J].

Heft, A. ;

Toelke, T. ;

Pfuch, A. ;

Erbe, C. .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2006, 90 (17) :2846-2854

[10]

IVANDA M, 1999, J MOL STRUCT, V645, P480

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