Deposition of bioactive glass-ceramic thin-films by RF magnetron sputtering

被引:47
|
作者
Mardare, CC [1 ]
Mardare, AI
Fernandes, JRF
Joanni, E
Pina, SCA
Fernandes, MHV
Correia, RN
机构
[1] INESC Porto, Unidade Optoelect & Sistemas Elect, P-4169007 Oporto, Portugal
[2] Univ Tras Os Montes & Alto Douro, Dept Fis, P-5001911 Vila Real, Portugal
[3] Univ Aveiro, Dept Engenharia Ceram & Vidro, P-3810193 Aveiro, Portugal
关键词
adhesion; biomedical applications; films; glass ceramics; X-ray methods; sputtering;
D O I
10.1016/S0955-2219(02)00278-9
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Thin films of bioactive glass-ceramics have been deposited on titanium and silicon substrates by RF magnetron sputtering. The crystalline phases and the microstructure of the films have been characterized using XRD and SEM analysis; the main phases present were calcium-magnesium phosphates, enstatite and forsterite. The adhesion of the films on titanium has been examined by pull-off testing; the adhesion strength for as-deposited films was around 40 MPa, but after crystallization the strength dropped to about half this value due to the presence of cracks. Samples kept in simulated body fluid showed an apatite-like layer, suggesting that the films are bioactive. (C) 2002 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:1027 / 1030
页数:4
相关论文
共 50 条
  • [1] Characterisation of copper thin films deposited on machinable glass-ceramic and glass by DC magnetron sputtering
    Desideri, Daniele
    Cavallin, Tommaso
    Maschio, Alvise
    Natali, Marco
    IET SCIENCE MEASUREMENT & TECHNOLOGY, 2014, 8 (01) : 1 - 8
  • [2] PREPARATION OF MGO THIN-FILMS BY RF MAGNETRON SPUTTERING
    KANEKO, Y
    MIKOSHIBA, N
    YAMASHITA, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (05): : 1091 - 1092
  • [3] Biocompatibility of GaSb thin films grown by RF magnetron sputtering
    Nishimoto, Naoki
    Fujihara, Junko
    Yoshino, Katsumi
    APPLIED SURFACE SCIENCE, 2017, 409 : 375 - 380
  • [4] RESIDUAL-STRESS IN STABILIZED ZIRCONIA THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING
    SCARDI, P
    POLONIOLI, P
    FERRARI, S
    THIN SOLID FILMS, 1994, 253 (1-2) : 349 - 355
  • [5] Highly adherent bioactive glass thin films synthetized by magnetron sputtering at low temperature
    Stan, G. E.
    Pasuk, I.
    Husanu, M. A.
    Enculescu, I.
    Pina, S.
    Lemos, A. F.
    Tulyaganov, D. U.
    El Mabrouk, K.
    Ferreira, J. M. F.
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN MEDICINE, 2011, 22 (12) : 2693 - 2710
  • [6] Influence of Deposition Temperature in The Fabrication of CdTe Thin Films using RF Magnetron Sputtering
    Aliyu, Mohammed Mannir
    Amin, Nowshad
    2017 IEEE PES POWERAFRICA CONFERENCE, 2017, : 227 - 230
  • [7] Effects of growth parameters on HfO2 thin-films deposited by RF Magnetron sputtering
    Dhanunjaya, M.
    Manikanthababu, N.
    Ojha, S.
    Pojprapai, Soodkhet
    Pathak, A. P.
    Rao, S. V. S. Nageswara
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 2022, 177 (1-2): : 15 - 26
  • [8] Deposition of amorphous thin films by unbalanced magnetron sputtering
    Hsieh, JH
    Tan, BH
    Liu, YC
    Zeng, XT
    PROCESSING AND FABRICATION OF ADVANCED MATERIALS VI, VOLS 1 & 2, 1998, : 1209 - 1218
  • [9] Effect of deposition temperature on the properties of nitrogen-doped AZO thin films grown on glass by rf reactive magnetron sputtering
    Cho, Shinho
    Kim, Heetae
    MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2010, 172 (03): : 327 - 330
  • [10] Antibacterial property of CuCrO2 thin films prepared by RF magnetron sputtering deposition
    Chiu, Te-Wei
    Yang, Yung-Chin
    Yeh, An-Chou
    Wang, Yung-Po
    Feng, Yi-Wei
    VACUUM, 2013, 87 : 174 - 177