Theoretical study on critical thickness of heteroepitaxial h-BN on hexagonal crystals

被引:5
作者
Yu, Jiadong [1 ]
Wang, Lai [1 ]
Hao, Zhibiao [1 ]
Luo, Yi [1 ]
Sun, Changzheng [1 ]
Han, Yanjun [1 ]
Xiong, Bing [1 ]
Wang, Jian [1 ]
Li, Hongtao [1 ]
机构
[1] Tsinghua Univ, Dept Elect Engn, Tsinghua Natl Lab Informat Sci & Technol, Beijing 100084, Peoples R China
基金
中国国家自然科学基金;
关键词
Line defects; Roughening; Inorganic compounds; Nitrides; LOW-TEMPERATURE GROWTH; BORON-NITRIDE; THERMAL-EXPANSION; EPITAXIAL-GROWTH; SURFACE ENERGIES; THIN-FILMS; CVD GROWTH; GRAPHENE; LAYER; ALN;
D O I
10.1016/j.jcrysgro.2017.03.045
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Hexagonal crystals are suitable underlayer candidates for hexagonal boron nitride (h-BN) heteroepitaxy due to their similar in-plane atomic arrangement. When the thickness of h-BN is beyond a critical value, its accumulated stress resulting from the lattice mismatch can be relaxed by generating dislocation or changing into three-dimensional growth. Here we calculate the evolution of h-BN critical thickness with the growth temperature when it is grown on various frequently-used hexagonal crystals for both cases. The results show that in order to minimize the lattice mismatch, a low growth temperature is preferred when grown on GaN or Si(111) while on the contrary when grown on 6H-SiC or alpha-Al2O3. Besides, AlN is the most unique underlayer as its lattice mismatch with h-BN is relatively small (< 0.7%) and they can even fully match around 1150 K, which means it can be used as a buffer layer for thick h-BN (> 100 nm) growth. Moreover, large area of two-dimensional thin h-BN (5-15 nm) layer can be obtained on GaN, 6H-SiC, Si(111) or a-Al2O3 except for graphene. On the other hand, calculation indicates that large area of graphene can be grown on h-BN. (C) 2017 Published by Elsevier B.V.
引用
收藏
页码:126 / 131
页数:6
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