Polysilicon thin layers for photovoltaic applications

被引:0
作者
Budianu, E [1 ]
Purica, M [1 ]
Rusu, E [1 ]
Manea, E [1 ]
Gavrila, R [1 ]
机构
[1] Natl Inst Res & Dev Microtechnol, Bucharest 72225, Romania
来源
CAS: 2002 INTERNATIONAL SEMICONDUCTOR CONFERENCE, VOLS 1 AND 2, PROCEEDINGS | 2001年
关键词
photovoltaic cell; thin film; polysilicon;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Thin layers of polycrystalline silicon as the optically absorbing material for photovoltaic devices represents a promising way. for simultaneously achieving of good performances and low manufacturing cost. In this paper, the preparation of polysilicon thin layers together with technological process for a p-i-n typed photovoltaic cell fabrication are presented. The crystalline structure, surface morphology and optical properties were investigated by AFM technique, X-ray diffraction and spectrophotometer measurements.
引用
收藏
页码:215 / 218
页数:4
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