Effect of gate-dielectrics on the electrical characteristics of solution-processed single-wall-carbon-nanotube thin-film transistors

被引:5
作者
Ha, Tae-Jun [1 ]
机构
[1] Kwangwoon Univ, Dept Elect Mat Engn, Seoul 01897, South Korea
基金
新加坡国家研究基金会;
关键词
single-well carbon-nanotube; thin-film transistor; gate dielectrics; interfacial impurity scattering; dipole interaction; low voltage operation; FIELD-EFFECT TRANSISTORS; ACTIVE-MATRIX BACKPLANES; LOGIC GATES; ELECTRONICS; HYSTERESIS; SENSORS;
D O I
10.1007/s13391-017-7005-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
High performance of solution-processed, single-wall-carbon-nanotube (SWCNT) thin-film transistors (TFTs) is investigated through the use in the different gatedielectrics of silicon dioxide (SiO2), silicon nitride (SiNx), the bilayers of SiO2 and SiNx, and hexagonal boron-nitride (h-BN) thin films. The different interfacial characteristics affect the electrical characteristics of the SWCNT-TFTs including key device metrics. Significantly, the hysteresis window that is normally observed in drop-casted SWCNT-TFTs was majorly suppressed by the employment of a thin lower dielectric-constant material on a higher dielectricconstant material. Sub-2V operating SWCNT-TFTs with solution-processed h-BN gate dielectrics with good above- and sub-threshold characteristics are also investigated on the basis of interfacial characteristics underlying the device physics. Such performance can be realized by the suppressed interfacial impurity scattering through the chemically clean interface combined with optimized solution-process below 100 A degrees C.
引用
收藏
页码:287 / 291
页数:5
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