Debris characteristics from a colloidal microjet target containing tin dioxide nano-particles

被引：1
|
作者：
Higashiguchi, Takeshi [2 ]
Suetake, Sumihiro [1 ]
Senba, Yusuke [1 ]
Sato, Yusuke [1 ]
Hosotani, Akira [1 ]
Takahashi, Yukari [1 ]
Kubodera, Shoichi [1 ]
机构：
[1] Miyazaki Univ, Photon Sci Ctr, Dept Elect & Elect Engn, Gakuen Kibanadai Nishi 1-1, Miyazaki 8892192, Japan
[2] Utsunomiya Univ, Grad Sch Engn, Dept Energy & Environm Sci, Utsunomiya, Tochigi 3218585, Japan
来源：
EMERGING LITHOGRAPHIC TECHNOLOGIES XI, PTS 1 AND 2 | 2007年 / 6517卷
关键词：
laser-produced plasma (LPP); extreme ultraviolet (EUV) emission; tin plasma; colloidal jet target;
D O I：
10.1117/12.711983
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Characteristics of suprathermal ions and neutral particles from a laser-produced tin plasma by use of a colloidal microjet target containing tin dioxide (SnO2) nanoparticles were investigated. Suprathermal ion emissions were reduced by producing a low-density preplasma. Simultaneously, the maximum conversion efficiency of 1.2% at 13.5 nm with a bandwidth of 2% and a solid angle of 2 pi sr was observed. Neutral particles, however, were not suppressed under the optimum laser-plasma conditions.
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页数：10
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