共 12 条
- [1] BORLAND J, 2007, 15 IEEE INT C UNPUB
- [4] FEUDEL T, 2006, 14 IEEE INT C UNPUB
- [5] Horstmann M, 2005, INT EL DEVICES MEET, P243
- [6] ITO T, 2002, TEEE INT S SEM UNPUB, P19
- [7] Advanced activation of ultra-shallow junctions using flash-assisted RTP [J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2005, 124 : 24 - 31
- [8] OOTSUKA F, 2003, INT EL DEV M
- [9] PAUL S, 2005, INT WORKSH INS UNPUB