Hardness measurement of CVD diamond coatings on SiC substrates

被引：22

作者：

Chowdhury, S

de Barra, E

Laugier, MT ^{[1
]}

机构：

[1] Univ Limerick, Dept Phys, Limerick, Ireland

[2] Univ Limerick, Dept Mat Sci & Technol, Limerick, Ireland

[3] Univ Limerick, Mat & Surface Sci Inst, Limerick, Ireland

来源：

SURFACE & COATINGS TECHNOLOGY | 2005年 / 193卷 / 1-3期

关键词：

diamond coatings; nanoindentation; hardness; vickers microhardness tester;

D O I：

10.1016/j.surfcoat.2004.08.131

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Hardness of CVD diamond coatings was determined by CSM (TM) nanohardness tester (NHT) and Vickers microhardness tester. Nanoindentation measurements were performed with loads from 50 to 300 mN and measured hardness and elastic modulus values were about 105 and 1147 GPa, respectively. These values were compared with the values found from the Vickers microhardness tester. This work justifies the use of the nanoindentation technique over conventional microhardness tests for reliable measurement of hardness of chemical vapour deposited (CVD) diamond coatings as microhardness testing resulted in localised damage precluding accurate measurement. (c) 2004 Elsevier B.V. All rights reserved.

引用

页码：200 / 205

页数：6

共 23 条

[1] Micromechanical estimation of composite hardness using nanoindentation technique for thin-film coated system [J].