共 6 条
[1]
ERDELYI A, 1954, TABLES INTEGRAL TRAN, V1, P165
[3]
LIEBERMAN MA, 1994, PRINCIPLES PLASMA DI, P238
[4]
MODELING AND SIMULATION OF GLOW-DISCHARGE PLASMA REACTORS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1994, 12 (04)
:1229-1236
[5]
Nanbu K., 1996, Reports of the Institute of Fluid Science, Tohoku University, V8, P77