Plate geometries for contact resonance atomic force microscopy: Modeling, optimization, and verification

被引：6

作者：

Aureli, Matteo ^{[1
]}

Ahsan, Syed N. ^{[1
]}

Shihab, Rafiul H. ^{[1
]}

Tung, Ryan C. ^{[1
]}

机构：

[1] Univ Nevada, Dept Mech Engn, Reno 1664 N Virginia St, Reno, NV 89557 USA

来源：

JOURNAL OF APPLIED PHYSICS | 2018年 / 124卷 / 01期

基金：

美国国家科学基金会;

关键词：

ACOUSTIC MICROSCOPY; ELASTIC PROPERTIES;

D O I：

10.1063/1.5038727

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A novel contact resonance atomic force microscopy (CR-AFM) method utilizing a two-dimensional Kirchhoff-Love plate framework is presented. Theoretical formulations are discussed, and the classic CR-AFM problem is re-cast into an easily implementable generalized eigenvalue problem. An analysis is performed to determine the optimal placement of the sensing tip for plates of different aspect ratios. Finally, an experiment is conducted using the finite element method to numerically verify the proposed technique. By using a plate geometry for CR-AFM and optimizing the sensor tip location, we achieve a higher measurement sensitivity and modal density when compared with standard AFM cantilever geometries. A higher modal density allows CR-AFM measurement to be conducted using more information extracting eigenmodes in a given frequency bandwidth. Published by AIP Publishing.

引用

页数：10

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