Angular sensing and chemical identification with quartz crystal oscillator sensor

被引：0

作者：

Tanaka, Hirokazu ^{[2
]}

Sato, Tornio ^{[3
]}

Kanno, Yoshinori ^{[1
]}

机构：

[1] Yamanashi Univ, Interdisciplinary Grad Sch Med & Engn, 4-3-11 Takeda, Kofu, Yamanashi 4008511, Japan

[2] Yamanashi Univ, Dept Mech Syst Engn, Kofu, Yamanashi 4008511, Japan

[3] Epson Toyocom Co, Hino, Tokyo 1918501, Japan

来源：

2006 IEEE INTERNATIONAL CONFERENCE ON SYSTEMS, MAN, AND CYBERNETICS, VOLS 1-6, PROCEEDINGS | 2006年

关键词：

D O I：

10.1109/ICSMC.2006.384916

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Gas sensors coated with mixed lipid film, mist sensors coated with lipid film, and angular sensors with an AT-cut quartz crystal oscillator were investigated. Mixed lipid film on the quartz crystal increased the sensitivity of the quartz crystal microbalance (QCM) gas sensors for Volatile Organic Compounds (VOCs). The approximate curves were created from the frequency shift curves of the gas sensors. The differential coefficients of the approximate curves at 25 and 50 see showed better classification of the VOCs. The mist sensors coated with lipid film had a different sensitivity to the volatile mists, where the fine mist of the volatile liquid was produced by an ultrasonic vibration of the atomizer. The angular sensor can detect a rotation angle by gravity sensitivity, where a hydroxyapatite thin layer has been deposited on an electrode of the oscillator in order to increase the gravity sensitivity. The frequency deviation caused by the rotation of oscillator shifted between -0.4 and 0.8 ppm.

引用

页码：1419 / +

页数：3

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