Simultaneous multi-channel absolute position alignment by multi-order grating interferometry

被引：12
作者：
Tao, Zhang [1 ]
Cui, Jiwen [1 ]
Tan, Jiubin [1 ]
机构：
[1] Harbin Inst Technol, D-405 Sci Pk,2 Yikuang St, Harbin 150080, Peoples R China
来源：
OPTICS EXPRESS | 2016年 / 24卷 / 02期
基金：
中国国家自然科学基金;
关键词：
MOIRE FRINGE; PROXIMITY LITHOGRAPHY; SYSTEM; PERFORMANCE; DISTANCE; DESIGN;
D O I：
10.1364/OE.24.000802
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A simultaneous multi-channel absolute position alignment system is investigated to determine the absolute position of a grating mark. By employing a multi-order grating interferometer and a multi-channel phase extraction method, many equivalent measurement results are generated simultaneously for stable and consistent measurement. By combining measurement results of different orders, low-order signals enabled large unambiguous measurement ranges, and high-order signals enhanced the measurement accuracy. Comparison experiments performed using an incremental HeNe reference interferometer yielded the standard deviations of smaller than 11.48nm under laboratory conditions. The proposed scheme will enable a new class of absolute position alignment system for industrial applications. (C) 2016 Optical Society of America
引用
收藏
页码：802 / 816
页数：15
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