共 17 条
Self-limited pore size reduction of mesoporous silica membranes via pyridine-catalyzed silicon dioxide ALD
被引:23
作者:

McCool, BA
论文数: 0 引用数: 0
h-index: 0
机构: Univ Maine, Dept Chem & Biol Engn, Orono, ME 04469 USA

DeSisto, WJ
论文数: 0 引用数: 0
h-index: 0
机构: Univ Maine, Dept Chem & Biol Engn, Orono, ME 04469 USA
机构:
[1] Univ Maine, Dept Chem & Biol Engn, Orono, ME 04469 USA
[2] Univ Maine, Surface Sci & Technol Lab, Orono, ME 04469 USA
关键词:
D O I:
10.1002/cvde.200304172
中图分类号:
O646 [电化学、电解、磁化学];
学科分类号:
081704 ;
摘要:
The pore size of mesoporous silica membranes is reduced using pyridine-catalyzed SiO2 ALD within the mesoporous matrix. The use of pyridine to catalyze the ALD results in lowering the reaction temperature to 80 degreesC. It also self-limits the pore size reduction as shown in gas permeation experiments. The self-limiting aspect of the deposition, controlled by size exclusion of catalyst from the pore, has the potential of controlling the pore size within the membrane. The paper concludes that this technique may prove useful as a general technique for healing defects in membranes.
引用
收藏
页码:190 / +
页数:6
相关论文
共 17 条
[1]
In situ monitoring of atomic layer controlled pore reduction in alumina tubular membranes using sequential surface reactions
[J].
Berland, BS
;
Gartland, IP
;
Ott, AW
;
George, SM
.
CHEMISTRY OF MATERIALS,
1998, 10 (12)
:3941-3950

Berland, BS
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Colorado, Dept Chem & Biochem, Boulder, CO 80309 USA Univ Colorado, Dept Chem & Biochem, Boulder, CO 80309 USA

Gartland, IP
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Colorado, Dept Chem & Biochem, Boulder, CO 80309 USA Univ Colorado, Dept Chem & Biochem, Boulder, CO 80309 USA

Ott, AW
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Colorado, Dept Chem & Biochem, Boulder, CO 80309 USA Univ Colorado, Dept Chem & Biochem, Boulder, CO 80309 USA

George, SM
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Colorado, Dept Chem & Biochem, Boulder, CO 80309 USA Univ Colorado, Dept Chem & Biochem, Boulder, CO 80309 USA
[2]
Atomic layer deposition of SiO2 and TiO2 in alumina tubular membranes:: Pore reduction and effect of surface species on gas transport
[J].
Cameron, MA
;
Gartland, IP
;
Smith, JA
;
Diaz, SF
;
George, SM
.
LANGMUIR,
2000, 16 (19)
:7435-7444

Cameron, MA
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Colorado, Dept Chem & Biochem, Boulder, CO 80309 USA Univ Colorado, Dept Chem & Biochem, Boulder, CO 80309 USA

Gartland, IP
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Colorado, Dept Chem & Biochem, Boulder, CO 80309 USA Univ Colorado, Dept Chem & Biochem, Boulder, CO 80309 USA

Smith, JA
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Colorado, Dept Chem & Biochem, Boulder, CO 80309 USA Univ Colorado, Dept Chem & Biochem, Boulder, CO 80309 USA

Diaz, SF
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Colorado, Dept Chem & Biochem, Boulder, CO 80309 USA Univ Colorado, Dept Chem & Biochem, Boulder, CO 80309 USA

George, SM
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Colorado, Dept Chem & Biochem, Boulder, CO 80309 USA Univ Colorado, Dept Chem & Biochem, Boulder, CO 80309 USA
[3]
Microstructural and gas separation properties of CVD modified mesoporous γ-alumina membranes
[J].
Cooper, CA
;
Lin, YS
.
JOURNAL OF MEMBRANE SCIENCE,
2002, 195 (01)
:35-50

Cooper, CA
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Cincinnati, Dept Chem Engn, Cincinnati, OH 45221 USA Univ Cincinnati, Dept Chem Engn, Cincinnati, OH 45221 USA

Lin, YS
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Cincinnati, Dept Chem Engn, Cincinnati, OH 45221 USA Univ Cincinnati, Dept Chem Engn, Cincinnati, OH 45221 USA
[4]
Inorganic membranes and solid state sciences
[J].
Cot, L
;
Ayral, A
;
Durand, J
;
Guizard, C
;
Hovnanian, N
;
Julbe, A
;
Larbot, A
.
SOLID STATE SCIENCES,
2000, 2 (03)
:313-334

Cot, L
论文数: 0 引用数: 0
h-index: 0
机构:
ENSCM, CNRS UM 2, UMR 5635, F-34296 Montpellier 5, France ENSCM, CNRS UM 2, UMR 5635, F-34296 Montpellier 5, France

Ayral, A
论文数: 0 引用数: 0
h-index: 0
机构:
ENSCM, CNRS UM 2, UMR 5635, F-34296 Montpellier 5, France ENSCM, CNRS UM 2, UMR 5635, F-34296 Montpellier 5, France

Durand, J
论文数: 0 引用数: 0
h-index: 0
机构:
ENSCM, CNRS UM 2, UMR 5635, F-34296 Montpellier 5, France ENSCM, CNRS UM 2, UMR 5635, F-34296 Montpellier 5, France

Guizard, C
论文数: 0 引用数: 0
h-index: 0
机构:
ENSCM, CNRS UM 2, UMR 5635, F-34296 Montpellier 5, France ENSCM, CNRS UM 2, UMR 5635, F-34296 Montpellier 5, France

Hovnanian, N
论文数: 0 引用数: 0
h-index: 0
机构:
ENSCM, CNRS UM 2, UMR 5635, F-34296 Montpellier 5, France ENSCM, CNRS UM 2, UMR 5635, F-34296 Montpellier 5, France

Julbe, A
论文数: 0 引用数: 0
h-index: 0
机构:
ENSCM, CNRS UM 2, UMR 5635, F-34296 Montpellier 5, France ENSCM, CNRS UM 2, UMR 5635, F-34296 Montpellier 5, France

Larbot, A
论文数: 0 引用数: 0
h-index: 0
机构:
ENSCM, CNRS UM 2, UMR 5635, F-34296 Montpellier 5, France ENSCM, CNRS UM 2, UMR 5635, F-34296 Montpellier 5, France
[5]
A kinetic model for step coverage by atomic layer deposition in narrow holes or trenches
[J].
Gordon, RG
;
Hausmann, D
;
Kim, E
;
Shepard, J
.
CHEMICAL VAPOR DEPOSITION,
2003, 9 (02)
:73-78

论文数: 引用数:
h-index:
机构:

Hausmann, D
论文数: 0 引用数: 0
h-index: 0
机构: Harvard Univ, Chem Labs, Cambridge, MA 02138 USA

Kim, E
论文数: 0 引用数: 0
h-index: 0
机构: Harvard Univ, Chem Labs, Cambridge, MA 02138 USA

Shepard, J
论文数: 0 引用数: 0
h-index: 0
机构: Harvard Univ, Chem Labs, Cambridge, MA 02138 USA
[6]
Atomic layer deposition of SiO2 at room temperature using NH3-catalyzed sequential surface reactions
[J].
Klaus, JW
;
George, SM
.
SURFACE SCIENCE,
2000, 447 (1-3)
:81-90

Klaus, JW
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Colorado, Dept Chem & Biochem, Boulder, CO 80309 USA Univ Colorado, Dept Chem & Biochem, Boulder, CO 80309 USA

George, SM
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Colorado, Dept Chem & Biochem, Boulder, CO 80309 USA Univ Colorado, Dept Chem & Biochem, Boulder, CO 80309 USA
[7]
Growth of SiO2 at room temperature with the use of catalyzed sequential half-reactions
[J].
Klaus, JW
;
Sneh, O
;
George, SM
.
SCIENCE,
1997, 278 (5345)
:1934-1936

Klaus, JW
论文数: 0 引用数: 0
h-index: 0
机构:
UNIV COLORADO,DEPT CHEM & BIOCHEM,BOULDER,CO 80309 UNIV COLORADO,DEPT CHEM & BIOCHEM,BOULDER,CO 80309

Sneh, O
论文数: 0 引用数: 0
h-index: 0
机构:
UNIV COLORADO,DEPT CHEM & BIOCHEM,BOULDER,CO 80309 UNIV COLORADO,DEPT CHEM & BIOCHEM,BOULDER,CO 80309

George, SM
论文数: 0 引用数: 0
h-index: 0
机构:
UNIV COLORADO,DEPT CHEM & BIOCHEM,BOULDER,CO 80309 UNIV COLORADO,DEPT CHEM & BIOCHEM,BOULDER,CO 80309
[8]
Microporous and dense inorganic membranes: current status and prospective
[J].
Lin, YS
.
SEPARATION AND PURIFICATION TECHNOLOGY,
2001, 25 (1-3)
:39-55

Lin, YS
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Cincinnati, Dept Chem Engn, Cincinnati, OH 45221 USA Univ Cincinnati, Dept Chem Engn, Cincinnati, OH 45221 USA
[9]
A THEORETICAL-ANALYSIS ON PORE-SIZE CHANGE OF POROUS CERAMIC MEMBRANES AFTER MODIFICATION
[J].
LIN, YS
.
JOURNAL OF MEMBRANE SCIENCE,
1993, 79 (01)
:55-64

LIN, YS
论文数: 0 引用数: 0
h-index: 0
机构: Department of Chemical Engineering, University of Cincinnati, Cincinnati
[10]
EXPERIMENTAL STUDIES ON PORE-SIZE CHANGE OF POROUS CERAMIC MEMBRANES AFTER MODIFICATION
[J].
LIN, YS
;
BURGGRAAF, AJ
.
JOURNAL OF MEMBRANE SCIENCE,
1993, 79 (01)
:65-82

LIN, YS
论文数: 0 引用数: 0
h-index: 0
机构:
UNIV TWENTE,INORGAN CHEM MAT SCI & CATALYSIS LAB,7500 AE ENSCHEDE,NETHERLANDS UNIV TWENTE,INORGAN CHEM MAT SCI & CATALYSIS LAB,7500 AE ENSCHEDE,NETHERLANDS

BURGGRAAF, AJ
论文数: 0 引用数: 0
h-index: 0
机构:
UNIV TWENTE,INORGAN CHEM MAT SCI & CATALYSIS LAB,7500 AE ENSCHEDE,NETHERLANDS UNIV TWENTE,INORGAN CHEM MAT SCI & CATALYSIS LAB,7500 AE ENSCHEDE,NETHERLANDS