Preparation and characterization of ultra-thin sol-gel films

被引:17
作者
Shapiro, Leora
Marx, Sharon
Mandler, Daniel [1 ]
机构
[1] Hebrew Univ Jerusalem, Dept Inorgan & Analyt Chem, IL-91904 Jerusalem, Israel
[2] Israel Inst Biol Res, Dept Chem Phys, IL-74100 Ness Ziona, Israel
关键词
sol-gel; silane; ultra-thin films; electrochemistry;
D O I
10.1016/j.tsf.2006.11.117
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The formation and characterization of nanometer thick sol-gel films are reported. The films were prepared by spin-coating of a diluted solution of a silane precursor on a number of different substrates. The effect of dilution, rotation speed and nature of substrate on the thickness and homogeneity of the films was examined. Characterization of the films was carried out by profilometry, reflectance spectroscopy, atomic force microscopy, adhesion test and electrochemistry. We find that the dilution factor has a pronounced effect on the film thickness. Moreover, the time of dilution, namely, whether dilution was carried out before or after a period of hydrolysis, has a noticeable effect on the thickness as well as on the permeability of embedded species. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:4624 / 4628
页数:5
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