Electron beam nanoprocessing of a carbon nanotube film using a variable pressure scanning electron microscope

被引：0

作者：

Niitsuma, Jun-ichi

Sekiguchi, Takashi

Yuan, Xiao-Li

Awano, Yuji

机构：

[1] Natl Inst Mat Sci, Nanomat Lab, Tsukuba, Ibaraki 3050044, Japan

[2] Japan Sci & Technol Agcy, ICORP, Nanoscale Quantum Conductor Array Project, Kawaguchi, Saitama 3320012, Japan

[3] Fujitsu Ltd, Atsugi, Kanagawa 2430197, Japan

[4] Fujitsu Labs Ltd, Nanotechnol Res Ctr, Atsugi, Kanagawa 2430197, Japan

来源：

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | 2007年 / 7卷 / 07期

关键词：

variable-pressure SEM; environmental SEM; carbon nanotube; electron beam; nanoprocessing;

D O I：

10.1166/jnn.2007.420

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We demonstrate a novel method of processing carbon nanotubes using a variable pressure scanning electron microscope. Lines were processed in a nanotube film by electron beam irradiation in oxygen gas and nitrogen gas. The processing mechanism can be explained in terms of gas ion sputtering and chemical reaction. In this experiment, the narrowest line width of 120 nm was achieved in a nitrogen atmosphere.

引用

页码：2356 / 2360

页数：5

共 21 条

[1] An investigation of the electron irradiation of carbon blacks in various gas atmospheres using a modified electron microscope [J].