Racetrack microresonator based electro-optic phase shifters on a 3C silicon-carbide-on-insulator platform

被引:20
作者
Fan, Tianren [1 ]
Wu, Xi [1 ]
Vangapandu, Sai R. M. [1 ]
Hosseinnia, Amir H. [1 ]
Eftekhar, Ali A. [1 ]
Adibi, Ali [1 ]
机构
[1] Georgia Inst Technol, Sch Elect & Comp Engn, Atlanta, GA 30332 USA
关键词
RESONATORS; INTEGRATION;
D O I
10.1364/OL.422560
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We report, to the best of our knowledge, the first demonstration of integrated electro-optic (EO) phase shifters based on racetrack microresonators on a 3C silicon-carbide-on-insulator (SiCOI) platform working at near-infrared wavelengths. By applying DC voltage in the crystalline axis perpendicular to the waveguide plane, we have observed optical phase shifts from the racetrack microresonators whose loaded quality (Q) factors are similar to 30,000. We show voltage-length product (V-pi center dot L-pi) of 118 V.cm, which corresponds to an EO coefficient r(41) of 2.6 pm/V. The SiCOI platform can be used to realize tunable silicon carbide integrated photonic devices that are desirable for applications in nonlinear and quantum photonics over a wide bandwidth that covers visible and infrared wavelengths. (C) 2021 Optical Society of America
引用
收藏
页码:2135 / 2138
页数:4
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