Evolution of phase transformation behavior and mechanical properties with crystallization in NiTi thin films

被引:21
作者
Huang, Xu [1 ]
San Juan, J. [2 ,3 ]
Ramirez, A. G. [1 ,3 ]
机构
[1] Yale Univ, Dept Mech Engn, New Haven, CT 06520 USA
[2] Univ Basque Country, Dept Fis Mat Condensada, E-48080 Bilbao, Spain
[3] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA
基金
美国国家科学基金会;
关键词
Amorphous materials; Thin films; Crystallization; Nanoindentation; Mechanical properties; NANOINDENTATION; STRESS; TEMPERATURE; PLASTICITY;
D O I
10.1016/j.scriptamat.2010.02.037
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The phase transformation and nanoindentation response as a function of crystallinity of NiTi thin films were assessed. A phase change was detectable in samples with 1% crystallization. Measured mechanical properties indicate that the films soften with crystallization. Films partway through crystallization presented a bimodal response: crystalline regions had moduli similar to fully crystallized films; and amorphous regions had larger moduli (larger than as-deposited amorphous films) attributable to structural relaxation. A modified Voigt model describes the evolution of the modulus in crystallizing films. (C) 2010 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
引用
收藏
页码:16 / 19
页数:4
相关论文
共 32 条
[1]  
Bhushan B., 1999, HDB MICRONANO TRIBOL, V2nd, P433
[2]   Substrate temperature effects on laser crystallized NiTi thin films [J].
Birnbaum, A. J. ;
Chung, Ui-Jin ;
Huang, X. ;
Im, James S. ;
Ramirez, A. G. ;
Yao, Y. L. .
JOURNAL OF APPLIED PHYSICS, 2009, 105 (07)
[3]   SHAPE-MEMORY PROPERTIES IN NI-TI SPUTTER-DEPOSITED FILM [J].
BUSCH, JD ;
JOHNSON, AD ;
LEE, CH ;
STEVENSON, DA .
JOURNAL OF APPLIED PHYSICS, 1990, 68 (12) :6224-6228
[4]   Structural relaxation and nanoindentation response in Zr-Cu-Ti amorphous thin films [J].
Chou, H. S. ;
Huang, J. C. ;
Chang, L. W. ;
Nieh, T. G. .
APPLIED PHYSICS LETTERS, 2008, 93 (19)
[5]   Characterization of TiNi shape-memory alloy thin films for MEMS applications [J].
Fu, YQ ;
Huang, WM ;
Du, HJ ;
Huang, X ;
Tan, JP ;
Gao, XY .
SURFACE & COATINGS TECHNOLOGY, 2001, 145 (1-3) :107-112
[6]  
Grummon DS, 2001, PHYS STATUS SOLIDI A, V186, P17, DOI 10.1002/1521-396X(200107)186:1<17::AID-PSSA17>3.0.CO
[7]  
2-T
[8]   Structural relaxation and crystallization of NiTi thin film metallic glasses [J].
Huang, Xu ;
Ramirez, A. G. .
APPLIED PHYSICS LETTERS, 2009, 95 (12)
[9]   Mechanical properties of Ti-Ni shape memory thin films formed by sputtering [J].
Ishida, A ;
Sato, M ;
Miyazaki, S .
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1999, 273 :754-757
[10]   Effects of crystallization temperature on the stress of NiTi thin films [J].
Lee, H. -J. ;
Huang, X. ;
Mohanchandra, K. P. ;
Carman, G. ;
Ramirez, A. G. .
SCRIPTA MATERIALIA, 2009, 60 (12) :1133-1136