Laser ablation via programmable image projection for submicron dimension machining in diamond

被引：23

作者：

Mills, B. ^{[1
]}

Heath, D. J. ^{[1
]}

Feinaeugle, M. ^{[1
]}

Grant-Jacob, J. A. ^{[1
]}

Eason, R. W. ^{[1
]}

机构：

[1] Univ Southampton, Optoelect Res Ctr, Southampton SO17 1BJ, Hants, England

来源：

JOURNAL OF LASER APPLICATIONS | 2014年 / 26卷 / 04期

基金：

英国工程与自然科学研究理事会;

关键词：

ultrafast; laser ablation; laser machining; diamond; yttrium iron garnet; digital micromirror device; spatial light modulator; image-projection; SINGLE-CRYSTAL DIAMOND; FEMTOSECOND LASER; SURFACE; MICROFABRICATION; GLASS;

D O I：

10.2351/1.4893749

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A digital micromirror device is used as an intensity spatial light modulator, in conjunction with a femtosecond laser, for programmable image-projection-based laser ablation of polycrystalline diamond. Results show the machining of complex structures on the diamond surface, where individual structures have submicron features, covering a total area of 10 x 10 mu m and fabricated using ten laser pulses. This dynamic image-based machining technique may offer speed advantages over serial-writing procedures, whilst still producing wavelength-scale feature sizes. (C) 2014 Laser Institute of America.

引用

页数：6

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