Retro-reflection type MOEMS VOA

被引：24
作者：
Chen, CC [1 ]
Lee, CK
Yeh, JA
机构：
[1] Asia Pacific Microsyst Inc, Hsinchu 300, Taiwan
[2] Natl Tsing Hua Univ, Inst Microelectro Mech Syst, Hsinchu 300, Taiwan
来源：
IEEE PHOTONICS TECHNOLOGY LETTERS | 2004年 / 16卷 / 10期
关键词：
micromirror; microoptoelectromechanical systems (MOEMS); variable optical attenuators (VOA);
D O I：
10.1109/LPT.2004.833964
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Novel microoptoelectromechanical systems (MOEMS) variable optical attenuators (VOAs) using retro-reflection attenuation scheme with initially open and closed states are proposed and characterized in this letter. This VOA device is comprised of two movable reflective micromirrors that are allocated in the front of input and output fibers and then assembled in a planar coaxial layout. The measured characteristics exhibit dynamic range of 50 dB, insertion loss of less than 0.9 dB, backreflection loss of less than -50 dB, and wavelength-dependent loss of less than 0.57 dB at 30-dB attenuation,, respectively. The MOEMS VOAs that attenuate light intensity using retro-reflection in free space is good for broad-band applications.
引用
收藏
页码：2290 / 2292
页数：3
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