Structure, scratch resistance and corrosion performance of nickel doped diamond-like carbon thin films

被引：39
作者：
Khun, N. W. [1 ]
Liu, E. [1 ]
Yang, G. C. [1 ]
机构：
[1] Nanyang Technol Univ, Sch Mech & Aerosp Engn, Singapore 639798, Singapore
来源：
SURFACE & COATINGS TECHNOLOGY | 2010年 / 204卷 / 20期
关键词：
DLC thin film; Ni doping; DC magnetron sputtering; Corrosion; NaCl electrolyte; CATHODIC VACUUM-ARC; AMORPHOUS-CARBON; MECHANICAL-PROPERTIES; BEHAVIOR; COATINGS; METAL; DEPOSITION;
D O I：
10.1016/j.surfcoat.2010.02.057
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Nickel doped diamond-like carbon (DLC:Ni) thin films were fabricated on conductive p-Si (100) substrates with DC magnetron sputtering deposition by varying DC power applied to a Ni target. The bonding structure, surface morphology, scratch resistance and corrosion resistance of the DLC:Ni films were studied using X-ray photoelectron spectroscopy (XPS), micro-Raman spectroscopy, atomic force microscopy (AFM), micro-scratch test, potentiodynamic polarization test and open circuit potential measurement. The results indicated that the corrosion resistance of the DLC:Ni films in a 0.6 M NaCl solution decreased with increased Ni content in the films though the films showed good passivation behavior in the NaCl solution. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码：3125 / 3130
页数：6
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