Pre-treatment for diamond coatings on free-shape WC-Co tools

被引：45

作者：

Zhang, ZM ^{[1
]}

He, XC ^{[1
]}

Shen, HS ^{[1
]}

Sun, FH ^{[1
]}

Chen, M ^{[1
]}

Wan, YZ ^{[1
]}

机构：

[1] Shanghai Jiao Tong Univ, Inst Microelect Technol, Shanghai 200030, Peoples R China

来源：

关键词：

pre-treated substrates; adhesion; diamond films; cutting tools;

D O I：

10.1016/S0925-9635(00)00328-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A new multiple chemical pre-treatment including microwave oxidation, reaction in alkaline solution and cleaning by ultrasonic treatment in acid solution has been performed for free shape cemented WC-Co tools in order to increase the diamond nucleation and to enhance the coating adhesion. High quality diamond films were deposited on such pre-treated substrates by a hot filament chemical vapor deposition (CVD) method using a mixture of acetone and hydrogen gases. After pre-treatment, the surface of the WC-Co substrate becomes slightly rough, but its composition or structure shows no changes identified by X-ray diffraction (XRD). Scanning electron microscopy (SEM) indicates a distribution of uniform micro-roughness WC grains on substrate surface. The results show that the multiple chemical pre-treatment effectively increases the diamond nucleation as well as greatly enhancing the coating adhesion. Especially, it is suitable for free-shape substrates, which may open the way to the use of diamond coatings for coated tool applications. (C) 2000 Elsevier Science S.A. All rights reserved.

引用

页码：1749 / 1752

页数：4

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