6 GHz Lithium Niobate MEMS Resonator with Square Spiral Electrodes

被引：1

作者：

Xie, Ying ^{[1
]}

Zhou, Jie ^{[1
]}

Liu, Yan ^{[1
]}

Wang, Lei ^{[1
]}

Cai, Yao ^{[1
]}

Sun, Chengliang ^{[1
]}

机构：

[1] Wuhan Univ, Inst Technol Sci, Wuhan, Peoples R China

来源：

INTERNATIONAL ULTRASONICS SYMPOSIUM (IEEE IUS 2021) | 2021年

基金：

国家重点研发计划; 中国国家自然科学基金;

关键词：

Lithium Niobate; 5 GHz resonators; bulk acoustic waves;

D O I：

10.1109/IUS52206.2021.9593843

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

Due to the increasing demand of higher frequencies for RF front end technologies, mainly for 5G smartphones, there is a need to develop filters for higher frequencies and large bandwidths. One of the promising candidates for satisfying those demands is the recently emerged laterally-excited bulk acoustic wave resonators. In this study, we aim to realize a resonator operating at 6 GHz based on the first-order antisymmetric (A1) mode utilizing Z-cut LiNbO3 thin films and square spiral electrodes.

引用

页数：3

共 7 条

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