Influence of silicon doping on vacancies and optical properties of AlxGa1-xN thin films

被引:20
作者
Slotte, J.
Tuomisto, F.
Saarinen, K.
Moe, C. G.
Keller, S.
DenBaars, S. P.
机构
[1] Aalto Univ, Phys Lab, FIN-02015 Helsinki, Finland
[2] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
[3] Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93106 USA
关键词
D O I
10.1063/1.2721132
中图分类号
O59 [应用物理学];
学科分类号
摘要
The authors have used positron annihilation spectroscopy and photoluminescence measurements to study the influence of silicon doping on vacancy formation in AlGaN:Si structures. The results show a correlation between the Doppler broadening measurements and the intensity from 510 nm photoluminescence transition. The reduction in the W parameter when the [Si]/[Al+Ga] fraction in the gas phase is above 3x10(-4) indicates that the positrons annihilate in an environment where less Ga 3d electrons are present, i.e., they are trapped in group-III vacancies. The observation of vacancies at these silicon concentrations coincides with the onset of the photoluminescence transition at 510 nm. (c) 2007 American Institute of Physics.
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