Microstructure and tribological behavior of pulsed laser deposited a-CNx films

被引：14
作者：
Zheng, X. H. [1 ,2 ]
Tu, J. P. [1 ]
Song, R. G. [2 ]
机构：
[1] Zhejiang Univ, Dept Mat Sci & Engn, State Key Lab Silicon Mat, Hangzhou 310027, Zhejiang, Peoples R China
[2] Zhejiang Univ Technol, MOE Key Lab Mech Mfg & Automat, Hangzhou 310032, Zhejiang, Peoples R China
来源：
APPLIED SURFACE SCIENCE | 2010年 / 256卷 / 10期
基金：
中国国家自然科学基金;
关键词：
Carbon-based coatings; Wear testing; Amorphous carbon nitride; Pulsed laser deposition; CARBON NITRIDE FILMS; THIN-FILMS; COATINGS; ABLATION; WEAR; PARAMETERS; GRAPHITE; FRICTION; SURFACE;
D O I：
10.1016/j.apsusc.2009.12.007
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The a-CNx films were deposited onto high-speed steel substrate by pulsed laser deposition at different nitrogen pressures. The tribological properties of the films in humid air and in vacuum were investigated using a ball-on-disk tribometer under various loads. The composition, microstructure and morphology of the films, wear tracks and paired balls were characterized by energy dispersive X-ray analysis (EDXA), X-ray photoelectron spectrum (XPS), Raman spectroscopy and scanning electron microscopy (SEM). With increasing the deposition pressure, the fraction of sp(3) C bond reduces, the fraction of trapped nitrogen increases and the friction coefficient of the films declines both in humid air and vacuum. The friction coefficient of a-CNx film decreases with increasing normal load. The tribological performances of the films in humid air are better than those of in vacuum. A transferred graphite-like tribo-layer is observed from a-CNx film to the paired ball for both environments. (C) 2009 Elsevier B. V. All rights reserved.
引用
收藏
页码：3211 / 3215
页数：5
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