Fabrication of NMR - microsensors for nanoliter sample volumes

被引：44

作者：

Dechow, J ^{[1
]}

Forchel, A ^{[1
]}

Lanz, T ^{[1
]}

Haase, A ^{[1
]}

机构：

[1] Univ Wurzburg, D-97074 Wurzburg, Germany

来源：

MICROELECTRONIC ENGINEERING | 2000年 / 53卷 / 1-4期

关键词：

D O I：

10.1016/S0167-9317(00)00368-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The fabrication of micro-sensors for NMR-spectroscopy on both glass and GaAs is presented. Planar coils with inner diameter from 50 mu m to 400 mu m including a coplanar wave-guide leading to the bonding pads were combined with a chamber for liquid samples of 200-500 mu m diameter on the backside of the substrate. The microcoil served as a receiver in a H-1-NMR experiment at 11T(500 MHz). In initial experiments, the spectrum of 60 nl-volumes of pure silicone-oil were detected by the microcoil.

引用

页码：517 / 519

页数：3

共 5 条

[1] NMR MICROSPECTROSCOPY USING 100-MU-M PLANAR RF-COILS FABRICATED ON GALLIUM-ARSENIDE SUBSTRATES [J].