共 25 条
[6]
Structure changes of Coulomb crystal in a carbon fine-particle plasma
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1997, 36 (7B)
:4976-4979
[7]
Observation of the trajectories of particles in process equipment by an in situ monitoring system using a laser light scattering method
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1998, 16 (06)
:3339-3343
[8]
Lieberman M. A., 1994, Principles of Plasma Discharges and Materials Processing, V1st ed.