Design Study for An Electro-Thermally Actuator for Micromanipulation

被引:0
|
作者
Voicu, Rodica [1 ]
Mueller, Raluca [1 ]
Eftime, Laura [1 ]
Tibeica, Catalin [1 ]
机构
[1] IMT Bucharest, Natl Inst R&D Microtechnol, Bucharest, Romania
来源
ROMANIAN JOURNAL OF INFORMATION SCIENCE AND TECHNOLOGY | 2009年 / 12卷 / 03期
关键词
micromanipulation; microgripper; SU-8; polymer; electro-thermal actuator; THERMAL ACTUATORS; MICROGRIPPER;
D O I
暂无
中图分类号
TP301 [理论、方法];
学科分类号
081202 ;
摘要
A new design for a polymeric microgripper was developed. Two microgrippers with different dimensions were considered. An evaluation between these models was performed using the simulation results. Finite-element analyses of the microgripper, using COVENTORWARE, are performed in order to evaluate the relation between the displacement, temperatures and the electrical current passing through the metallic layers.
引用
收藏
页码:402 / 409
页数:8
相关论文
共 50 条
  • [1] A NEW DESIGN BASED ON ELECTRO-THERMALLY ACTUATION FOR AN SU-8 MICROGRIPPER
    Voicu, Rodica
    Muller, Raluca
    Effime, Laura
    CAS: 2008 INTERNATIONAL SEMICONDUCTOR CONFERENCE, PROCEEDINGS, 2008, : 205 - 208
  • [2] Design and Simulation Study for an Electro-Thermally Actuated Micromanipulator
    Voicu, Rodica
    Tibeica, Catalin
    Muller, Raluca
    EUROSIME 2009: THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICRO-ELECTRONICS AND MICRO-SYSTEMS, 2009, : 429 - 433
  • [3] Design and FEM analysis of a new micromachined electro-thermally actuated micromanipulator
    Voicu, Rodica Cristina
    Muller, Raluca
    ANALOG INTEGRATED CIRCUITS AND SIGNAL PROCESSING, 2014, 78 (02) : 313 - 321
  • [4] New Electro-Thermally Actuated Micromanipulator with Optimized Design and FEM Simulations Analyses
    Voicu, Rodica
    Muller, Raluca
    2013 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP), 2013,
  • [5] Topology Optimized Design, Microfabrication and Characterization of Electro-Thermally Driven Microgripper
    Rubio, Wilfredo M.
    Silva, Emilio C. N.
    Bordatchev, Evgueni V.
    Zeman, Marco J. F.
    JOURNAL OF INTELLIGENT MATERIAL SYSTEMS AND STRUCTURES, 2009, 20 (06) : 669 - 681
  • [6] Design and FEM analysis of a new micromachined electro-thermally actuated micromanipulator
    Rodica Cristina Voicu
    Raluca Műller
    Analog Integrated Circuits and Signal Processing, 2014, 78 : 313 - 321
  • [7] Electro-thermally driven microgrippers for micro-electro-mechanical systems applications
    Bordatchev, EV
    Nikumb, SK
    JOURNAL OF MICROLITHOGRAPHY MICROFABRICATION AND MICROSYSTEMS, 2005, 4 (02): : 1 - 7
  • [8] Design and Fabrication of Electro-thermally Activated Micro Gripper With Large Tip Opening and Holding Force
    Khazaai, Jay J.
    Qu, Hongwei
    Shillor, Meir
    Smith, Lorenzo
    2011 IEEE SENSORS, 2011, : 1445 - 1448
  • [9] An Aluminum Electro-Thermally Actuated Micro-Tweezer: Manufacturing and Characterization
    Voicu, Rodica-Cristina
    Tibeica, Catalin
    MICROMACHINES, 2023, 14 (04)
  • [10] Design and Analysis of a High-Gain and Robust Multi-DOF Electro-thermally Actuated MEMS Gyroscope
    Saqib, Muhammad
    Saleem, Muhammad Mubasher
    Mazhar, Naveed
    Awan, Saif Ullah
    Khan, Umar Shahbaz
    MICROMACHINES, 2018, 9 (11):