共 50 条
[31]
Hot target magnetron sputtering enhanced by RF-ICP source for CrNx coatings deposition
[J].
Grudinin, V. A.
;
Sidelev, D. V.
;
Bleykher, G. A.
;
Yuriev, YuN.
;
Krivobokov, V. P.
;
Berlin, E. V.
;
Grigoriev, V. Yu
;
Obrosov, A.
;
Weiss, S.
.
VACUUM,
2021, 191

Grudinin, V. A.
论文数: 0 引用数: 0
h-index: 0
机构:
Tomsk Polytech Univ, Tomsk 634050, Russia Tomsk Polytech Univ, Tomsk 634050, Russia

Sidelev, D. V.
论文数: 0 引用数: 0
h-index: 0
机构:
Tomsk Polytech Univ, Tomsk 634050, Russia Tomsk Polytech Univ, Tomsk 634050, Russia

Bleykher, G. A.
论文数: 0 引用数: 0
h-index: 0
机构:
Tomsk Polytech Univ, Tomsk 634050, Russia Tomsk Polytech Univ, Tomsk 634050, Russia

Yuriev, YuN.
论文数: 0 引用数: 0
h-index: 0
机构:
Tomsk Polytech Univ, Tomsk 634050, Russia Tomsk Polytech Univ, Tomsk 634050, Russia

Krivobokov, V. P.
论文数: 0 引用数: 0
h-index: 0
机构:
Tomsk Polytech Univ, Tomsk 634050, Russia Tomsk Polytech Univ, Tomsk 634050, Russia

Berlin, E. V.
论文数: 0 引用数: 0
h-index: 0
机构:
Lab Vacuum Technol Plus LLC, Moscow 124460, Russia Tomsk Polytech Univ, Tomsk 634050, Russia

Grigoriev, V. Yu
论文数: 0 引用数: 0
h-index: 0
机构:
Lab Vacuum Technol Plus LLC, Moscow 124460, Russia Tomsk Polytech Univ, Tomsk 634050, Russia

Obrosov, A.
论文数: 0 引用数: 0
h-index: 0
机构:
Brandenburg Tech Univ Cottbus, D-03046 Cottbus, Germany Tomsk Polytech Univ, Tomsk 634050, Russia

论文数: 引用数:
h-index:
机构:
[32]
Hybrid magnetron sputtering and pulsed laser ablation for the deposition of composite ZnO-Au films
[J].
Depablos-Rivera, Osmary
;
Sanchez-Ake, Citlali
;
Alvarez-Mendoza, Raul
;
Garcia-Fernandez, Tupak
;
Muhl, Stephen
;
Villagran-Muniz, Mayo
.
THIN SOLID FILMS,
2019, 685 (66-74)
:66-74

Depablos-Rivera, Osmary
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Nacl Autonoma Mexico, Inst Ciencias Aplicadas & Tecnol, Circuito Exterior S-N,Ciudad Univ, Ciudad De Mexico 04510, Mexico Univ Nacl Autonoma Mexico, Inst Ciencias Aplicadas & Tecnol, Circuito Exterior S-N,Ciudad Univ, Ciudad De Mexico 04510, Mexico

Sanchez-Ake, Citlali
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Nacl Autonoma Mexico, Inst Ciencias Aplicadas & Tecnol, Circuito Exterior S-N,Ciudad Univ, Ciudad De Mexico 04510, Mexico Univ Nacl Autonoma Mexico, Inst Ciencias Aplicadas & Tecnol, Circuito Exterior S-N,Ciudad Univ, Ciudad De Mexico 04510, Mexico

Alvarez-Mendoza, Raul
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Nacl Autonoma Mexico, Inst Ciencias Aplicadas & Tecnol, Circuito Exterior S-N,Ciudad Univ, Ciudad De Mexico 04510, Mexico
Univ Nacl Autonoma Mexico, Fac Ciencias, Circuito Exterior S-N,Ciudad Univ, Ciudad De Mexico 04510, Mexico Univ Nacl Autonoma Mexico, Inst Ciencias Aplicadas & Tecnol, Circuito Exterior S-N,Ciudad Univ, Ciudad De Mexico 04510, Mexico

Garcia-Fernandez, Tupak
论文数: 0 引用数: 0
h-index: 0
机构:
UACM, Prolongac San Isidro 151, Ciudad De Mexico 09790, Mexico Univ Nacl Autonoma Mexico, Inst Ciencias Aplicadas & Tecnol, Circuito Exterior S-N,Ciudad Univ, Ciudad De Mexico 04510, Mexico

Muhl, Stephen
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Nacl Autonoma Mexico, Inst Invest Mat, Circuito Exterior S-N,Ciudad Univ, Ciudad De Mexico 04510, Mexico Univ Nacl Autonoma Mexico, Inst Ciencias Aplicadas & Tecnol, Circuito Exterior S-N,Ciudad Univ, Ciudad De Mexico 04510, Mexico

Villagran-Muniz, Mayo
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Nacl Autonoma Mexico, Inst Ciencias Aplicadas & Tecnol, Circuito Exterior S-N,Ciudad Univ, Ciudad De Mexico 04510, Mexico Univ Nacl Autonoma Mexico, Inst Ciencias Aplicadas & Tecnol, Circuito Exterior S-N,Ciudad Univ, Ciudad De Mexico 04510, Mexico
[33]
Deposition of nanostructured crystalline alumina thin film by twin targets reactive high power impulse magnetron sputtering
[J].
Zhou, Guangxue
;
Wang, Langping
;
Wang, Xiaofeng
;
Yu, Yonghao
.
APPLIED SURFACE SCIENCE,
2018, 455
:310-317

Zhou, Guangxue
论文数: 0 引用数: 0
h-index: 0
机构:
Harbin Inst Technol, State Key Lab Adv Welding & Joining, Harbin 150001, Heilongjiang, Peoples R China Harbin Inst Technol, State Key Lab Adv Welding & Joining, Harbin 150001, Heilongjiang, Peoples R China

Wang, Langping
论文数: 0 引用数: 0
h-index: 0
机构:
Harbin Inst Technol, State Key Lab Adv Welding & Joining, Harbin 150001, Heilongjiang, Peoples R China Harbin Inst Technol, State Key Lab Adv Welding & Joining, Harbin 150001, Heilongjiang, Peoples R China

Wang, Xiaofeng
论文数: 0 引用数: 0
h-index: 0
机构:
Harbin Inst Technol, State Key Lab Adv Welding & Joining, Harbin 150001, Heilongjiang, Peoples R China Harbin Inst Technol, State Key Lab Adv Welding & Joining, Harbin 150001, Heilongjiang, Peoples R China

Yu, Yonghao
论文数: 0 引用数: 0
h-index: 0
机构:
Harbin Inst Technol, Acad Fundamental & Interdisciplinary Sci, Harbin 150001, Heilongjiang, Peoples R China Harbin Inst Technol, State Key Lab Adv Welding & Joining, Harbin 150001, Heilongjiang, Peoples R China
[34]
Investigation of the properties of W-doped ZnO thin films with modulation power deposition by RF magnetron sputtering
[J].
Chen, Yichuan
;
Hu, Yuehui
;
Zhang, Xiaohua
;
Hu, Keyan
;
Tong, Fan
;
Lao, Zixuan
;
Shuai, Weiqiang
.
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS,
2017, 28 (07)
:5498-5503

Chen, Yichuan
论文数: 0 引用数: 0
h-index: 0
机构:
Jingdezhen Ceram Inst, Sch Mech & Elect Engn, Jingdezhen 333403, Jiangxi, Peoples R China Jingdezhen Ceram Inst, Sch Mech & Elect Engn, Jingdezhen 333403, Jiangxi, Peoples R China

Hu, Yuehui
论文数: 0 引用数: 0
h-index: 0
机构:
Jingdezhen Ceram Inst, Sch Mech & Elect Engn, Jingdezhen 333403, Jiangxi, Peoples R China Jingdezhen Ceram Inst, Sch Mech & Elect Engn, Jingdezhen 333403, Jiangxi, Peoples R China

Zhang, Xiaohua
论文数: 0 引用数: 0
h-index: 0
机构:
Jingdezhen Ceram Inst, Sch Mech & Elect Engn, Jingdezhen 333403, Jiangxi, Peoples R China Jingdezhen Ceram Inst, Sch Mech & Elect Engn, Jingdezhen 333403, Jiangxi, Peoples R China

Hu, Keyan
论文数: 0 引用数: 0
h-index: 0
机构:
Jingdezhen Ceram Inst, Sch Mech & Elect Engn, Jingdezhen 333403, Jiangxi, Peoples R China Jingdezhen Ceram Inst, Sch Mech & Elect Engn, Jingdezhen 333403, Jiangxi, Peoples R China

Tong, Fan
论文数: 0 引用数: 0
h-index: 0
机构:
Jingdezhen Ceram Inst, Sch Mech & Elect Engn, Jingdezhen 333403, Jiangxi, Peoples R China Jingdezhen Ceram Inst, Sch Mech & Elect Engn, Jingdezhen 333403, Jiangxi, Peoples R China

Lao, Zixuan
论文数: 0 引用数: 0
h-index: 0
机构:
Jingdezhen Ceram Inst, Sch Mech & Elect Engn, Jingdezhen 333403, Jiangxi, Peoples R China Jingdezhen Ceram Inst, Sch Mech & Elect Engn, Jingdezhen 333403, Jiangxi, Peoples R China

Shuai, Weiqiang
论文数: 0 引用数: 0
h-index: 0
机构:
Jingdezhen Ceram Inst, Sch Mech & Elect Engn, Jingdezhen 333403, Jiangxi, Peoples R China Jingdezhen Ceram Inst, Sch Mech & Elect Engn, Jingdezhen 333403, Jiangxi, Peoples R China
[35]
Effect of Discharge Power on the Properties of GaN Thin Films on AlN-(002) Prepared by Magnetron Sputtering Deposition
[J].
Tahan, Muliana
;
Nayan, Nafarizal
;
Abd Razak, Siti Noraiza
;
Bakri, Anis Suhaili
;
Azman, Zulkifli
;
Sandan, Mohd Zainizan
;
Rahip, Nur Amaliyana
;
Abu Bakar, Ahmad Shuhaimi
;
Ahmad, Mohd Yazid
.
INTERNATIONAL JOURNAL OF NANOELECTRONICS AND MATERIALS,
2020, 13 (03)
:483-492

Tahan, Muliana
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Tun Hussein Onn Malaysia, Microelect & Nanotechnol Shamsuddin Res Ctr MiNT, Inst Integrated Engn, Batu Pahat 86400, Johor, Malaysia Univ Tun Hussein Onn Malaysia, Microelect & Nanotechnol Shamsuddin Res Ctr MiNT, Inst Integrated Engn, Batu Pahat 86400, Johor, Malaysia

Nayan, Nafarizal
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Tun Hussein Onn Malaysia, Microelect & Nanotechnol Shamsuddin Res Ctr MiNT, Inst Integrated Engn, Batu Pahat 86400, Johor, Malaysia Univ Tun Hussein Onn Malaysia, Microelect & Nanotechnol Shamsuddin Res Ctr MiNT, Inst Integrated Engn, Batu Pahat 86400, Johor, Malaysia

Abd Razak, Siti Noraiza
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Tun Hussein Onn Malaysia, Microelect & Nanotechnol Shamsuddin Res Ctr MiNT, Inst Integrated Engn, Batu Pahat 86400, Johor, Malaysia Univ Tun Hussein Onn Malaysia, Microelect & Nanotechnol Shamsuddin Res Ctr MiNT, Inst Integrated Engn, Batu Pahat 86400, Johor, Malaysia

Bakri, Anis Suhaili
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Tun Hussein Onn Malaysia, Microelect & Nanotechnol Shamsuddin Res Ctr MiNT, Inst Integrated Engn, Batu Pahat 86400, Johor, Malaysia Univ Tun Hussein Onn Malaysia, Microelect & Nanotechnol Shamsuddin Res Ctr MiNT, Inst Integrated Engn, Batu Pahat 86400, Johor, Malaysia

Azman, Zulkifli
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Tun Hussein Onn Malaysia, Microelect & Nanotechnol Shamsuddin Res Ctr MiNT, Inst Integrated Engn, Batu Pahat 86400, Johor, Malaysia Univ Tun Hussein Onn Malaysia, Microelect & Nanotechnol Shamsuddin Res Ctr MiNT, Inst Integrated Engn, Batu Pahat 86400, Johor, Malaysia

Sandan, Mohd Zainizan
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Tun Hussein Onn Malaysia, Microelect & Nanotechnol Shamsuddin Res Ctr MiNT, Inst Integrated Engn, Batu Pahat 86400, Johor, Malaysia Univ Tun Hussein Onn Malaysia, Microelect & Nanotechnol Shamsuddin Res Ctr MiNT, Inst Integrated Engn, Batu Pahat 86400, Johor, Malaysia

Rahip, Nur Amaliyana
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Def Univ Malaysia, Dept Elect & Elect Engn, Kuala Lumpur 57000, Malaysia Univ Tun Hussein Onn Malaysia, Microelect & Nanotechnol Shamsuddin Res Ctr MiNT, Inst Integrated Engn, Batu Pahat 86400, Johor, Malaysia

Abu Bakar, Ahmad Shuhaimi
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Malaya, Fac Sci, Dept Phys, Low Dimens Mat Res Ctr, Kuala Lumpur 50603, Malaysia Univ Tun Hussein Onn Malaysia, Microelect & Nanotechnol Shamsuddin Res Ctr MiNT, Inst Integrated Engn, Batu Pahat 86400, Johor, Malaysia

Ahmad, Mohd Yazid
论文数: 0 引用数: 0
h-index: 0
机构:
Nanorian Technol Sdn Bhd, 40&40,1 Jln Kajang Perdana 3-2, Kajang 43000, Selangor, Malaysia Univ Tun Hussein Onn Malaysia, Microelect & Nanotechnol Shamsuddin Res Ctr MiNT, Inst Integrated Engn, Batu Pahat 86400, Johor, Malaysia
[36]
Cu films prepared by bipolar pulsed high power impulse magnetron sputtering
[J].
Wu, Baohua
;
Haehnlein, Ian
;
Shchelkanov, Ivan
;
McLain, Jake
;
Patel, Dhruval
;
Uhlig, Jan
;
Jurczyk, Brian
;
Leng, Yongxiang
;
Ruzic, David N.
.
VACUUM,
2018, 150
:216-221

Wu, Baohua
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Illinois, Dept Nucl Plasma & Radiol Engn, Urbana, IL 61801 USA
Southwest Jiaotong Univ, Chengdu 610031, Sichuan, Peoples R China Univ Illinois, Dept Nucl Plasma & Radiol Engn, Urbana, IL 61801 USA

Haehnlein, Ian
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Illinois, Dept Nucl Plasma & Radiol Engn, Urbana, IL 61801 USA
Starfire Ind, Urbana, IL 61801 USA Univ Illinois, Dept Nucl Plasma & Radiol Engn, Urbana, IL 61801 USA

Shchelkanov, Ivan
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Illinois, Dept Nucl Plasma & Radiol Engn, Urbana, IL 61801 USA Univ Illinois, Dept Nucl Plasma & Radiol Engn, Urbana, IL 61801 USA

McLain, Jake
论文数: 0 引用数: 0
h-index: 0
机构:
Starfire Ind, Urbana, IL 61801 USA Univ Illinois, Dept Nucl Plasma & Radiol Engn, Urbana, IL 61801 USA

Patel, Dhruval
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Illinois, Dept Nucl Plasma & Radiol Engn, Urbana, IL 61801 USA Univ Illinois, Dept Nucl Plasma & Radiol Engn, Urbana, IL 61801 USA

Uhlig, Jan
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Illinois, Dept Nucl Plasma & Radiol Engn, Urbana, IL 61801 USA Univ Illinois, Dept Nucl Plasma & Radiol Engn, Urbana, IL 61801 USA

Jurczyk, Brian
论文数: 0 引用数: 0
h-index: 0
机构:
Starfire Ind, Urbana, IL 61801 USA Univ Illinois, Dept Nucl Plasma & Radiol Engn, Urbana, IL 61801 USA

Leng, Yongxiang
论文数: 0 引用数: 0
h-index: 0
机构:
Southwest Jiaotong Univ, Chengdu 610031, Sichuan, Peoples R China Univ Illinois, Dept Nucl Plasma & Radiol Engn, Urbana, IL 61801 USA

Ruzic, David N.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Illinois, Dept Nucl Plasma & Radiol Engn, Urbana, IL 61801 USA Univ Illinois, Dept Nucl Plasma & Radiol Engn, Urbana, IL 61801 USA
[37]
Cubic BN thin film deposition by a RF magnetron sputtering
[J].
Pat, Suat
;
Silik, Erbil
;
Musaoglu, Caner
;
Ozen, Soner
;
Mohammadigharehbagh, Reza
;
Yudar, H. Hakan
;
Korkmaz, Sadan
.
VACUUM,
2018, 157
:31-35

Pat, Suat
论文数: 0 引用数: 0
h-index: 0
机构:
Eskisehir Osmangazi Univ, Phys Dept, Eskisehir, Turkey Eskisehir Osmangazi Univ, Phys Dept, Eskisehir, Turkey

Silik, Erbil
论文数: 0 引用数: 0
h-index: 0
机构:
Eskisehir Osmangazi Univ, Phys Dept, Eskisehir, Turkey Eskisehir Osmangazi Univ, Phys Dept, Eskisehir, Turkey

Musaoglu, Caner
论文数: 0 引用数: 0
h-index: 0
机构:
Eskisehir Osmangazi Univ, Dept Nanosci & Nanotechnol, Eskisehir, Turkey Eskisehir Osmangazi Univ, Phys Dept, Eskisehir, Turkey

Ozen, Soner
论文数: 0 引用数: 0
h-index: 0
机构:
Eskisehir Osmangazi Univ, Phys Dept, Eskisehir, Turkey Eskisehir Osmangazi Univ, Phys Dept, Eskisehir, Turkey

Mohammadigharehbagh, Reza
论文数: 0 引用数: 0
h-index: 0
机构:
Eskisehir Osmangazi Univ, Phys Dept, Eskisehir, Turkey
Islamic Azad Univ, Dept Phys, Urmia Branch, Orumiyeh, Iran Eskisehir Osmangazi Univ, Phys Dept, Eskisehir, Turkey

Yudar, H. Hakan
论文数: 0 引用数: 0
h-index: 0
机构:
Eskisehir Osmangazi Univ, Phys Dept, Eskisehir, Turkey Eskisehir Osmangazi Univ, Phys Dept, Eskisehir, Turkey

Korkmaz, Sadan
论文数: 0 引用数: 0
h-index: 0
机构:
Eskisehir Osmangazi Univ, Phys Dept, Eskisehir, Turkey Eskisehir Osmangazi Univ, Phys Dept, Eskisehir, Turkey
[38]
RuAl Thin-Film Deposition by DC Magnetron Sputtering
[J].
Ott, Vincent
;
Wojcik, Tomasz
;
Kolozsvari, Szilard
;
Polcik, Peter
;
Schaefer, Christian
;
Pauly, Christoph
;
Muecklich, Frank
;
Ulrich, Sven
;
Mayrhofer, Paul H.
;
Riedl, Helmut
;
Stueber, Michael
.
ADVANCED ENGINEERING MATERIALS,
2025, 27 (03)

Ott, Vincent
论文数: 0 引用数: 0
h-index: 0
机构:
Karlsruhe Inst Technol, Inst Appl Mat, Hermann Von Helmholtz Pl 1, D-76344 Eggenstein Leopoldshafen, Germany Karlsruhe Inst Technol, Inst Appl Mat, Hermann Von Helmholtz Pl 1, D-76344 Eggenstein Leopoldshafen, Germany

Wojcik, Tomasz
论文数: 0 引用数: 0
h-index: 0
机构:
TU Wien, Inst Mat Sci & Technol, Getreidemarkt 9, A-1060 Vienna, Austria Karlsruhe Inst Technol, Inst Appl Mat, Hermann Von Helmholtz Pl 1, D-76344 Eggenstein Leopoldshafen, Germany

Kolozsvari, Szilard
论文数: 0 引用数: 0
h-index: 0
机构:
Plansee Composite Mat GmbH, Siebenburgerstr 23, D-86983 Lechbruck Am See, Germany Karlsruhe Inst Technol, Inst Appl Mat, Hermann Von Helmholtz Pl 1, D-76344 Eggenstein Leopoldshafen, Germany

Polcik, Peter
论文数: 0 引用数: 0
h-index: 0
机构:
Plansee Composite Mat GmbH, Siebenburgerstr 23, D-86983 Lechbruck Am See, Germany Karlsruhe Inst Technol, Inst Appl Mat, Hermann Von Helmholtz Pl 1, D-76344 Eggenstein Leopoldshafen, Germany

Schaefer, Christian
论文数: 0 引用数: 0
h-index: 0
机构:
Saarland Univ, Funct Mat, Campus D3 3, D-66123 Saarbrucken, Germany Karlsruhe Inst Technol, Inst Appl Mat, Hermann Von Helmholtz Pl 1, D-76344 Eggenstein Leopoldshafen, Germany

论文数: 引用数:
h-index:
机构:

Muecklich, Frank
论文数: 0 引用数: 0
h-index: 0
机构:
Saarland Univ, Funct Mat, Campus D3 3, D-66123 Saarbrucken, Germany Karlsruhe Inst Technol, Inst Appl Mat, Hermann Von Helmholtz Pl 1, D-76344 Eggenstein Leopoldshafen, Germany

Ulrich, Sven
论文数: 0 引用数: 0
h-index: 0
机构:
Karlsruhe Inst Technol, Inst Appl Mat, Hermann Von Helmholtz Pl 1, D-76344 Eggenstein Leopoldshafen, Germany Karlsruhe Inst Technol, Inst Appl Mat, Hermann Von Helmholtz Pl 1, D-76344 Eggenstein Leopoldshafen, Germany

Mayrhofer, Paul H.
论文数: 0 引用数: 0
h-index: 0
机构:
TU Wien, Inst Mat Sci & Technol, Getreidemarkt 9, A-1060 Vienna, Austria Karlsruhe Inst Technol, Inst Appl Mat, Hermann Von Helmholtz Pl 1, D-76344 Eggenstein Leopoldshafen, Germany

Riedl, Helmut
论文数: 0 引用数: 0
h-index: 0
机构:
TU Wien, Inst Mat Sci & Technol, Getreidemarkt 9, A-1060 Vienna, Austria Karlsruhe Inst Technol, Inst Appl Mat, Hermann Von Helmholtz Pl 1, D-76344 Eggenstein Leopoldshafen, Germany

Stueber, Michael
论文数: 0 引用数: 0
h-index: 0
机构:
Karlsruhe Inst Technol, Inst Appl Mat, Hermann Von Helmholtz Pl 1, D-76344 Eggenstein Leopoldshafen, Germany Karlsruhe Inst Technol, Inst Appl Mat, Hermann Von Helmholtz Pl 1, D-76344 Eggenstein Leopoldshafen, Germany
[39]
Effect of duty cycles on the deposition and characteristics of high power impulse magnetron sputtering deposited TiN thin films
[J].
Chang, Chi-Lung
;
Shih, Siao-Gu
;
Chen, Pin-Hung
;
Chen, Wei-Chih
;
Ho, Chun-Ta
;
Wu, Wan-Yu
.
SURFACE & COATINGS TECHNOLOGY,
2014, 259
:232-237

Chang, Chi-Lung
论文数: 0 引用数: 0
h-index: 0
机构:
MingDao Univ, Dept Mat Sci & Engn, Changhua, Taiwan
MingDao Univ, Surface Engn Res Ctr, Changhua, Taiwan MingDao Univ, Dept Mat Sci & Engn, Changhua, Taiwan

Shih, Siao-Gu
论文数: 0 引用数: 0
h-index: 0
机构:
MingDao Univ, Dept Mat Sci & Engn, Changhua, Taiwan MingDao Univ, Dept Mat Sci & Engn, Changhua, Taiwan

Chen, Pin-Hung
论文数: 0 引用数: 0
h-index: 0
机构:
MingDao Univ, Surface Engn Res Ctr, Changhua, Taiwan MingDao Univ, Dept Mat Sci & Engn, Changhua, Taiwan

Chen, Wei-Chih
论文数: 0 引用数: 0
h-index: 0
机构:
MingDao Univ, Surface Engn Res Ctr, Changhua, Taiwan MingDao Univ, Dept Mat Sci & Engn, Changhua, Taiwan

Ho, Chun-Ta
论文数: 0 引用数: 0
h-index: 0
机构:
MingDao Univ, Surface Engn Res Ctr, Changhua, Taiwan MingDao Univ, Dept Mat Sci & Engn, Changhua, Taiwan

Wu, Wan-Yu
论文数: 0 引用数: 0
h-index: 0
机构:
MingDao Univ, Dept Mat Sci & Engn, Changhua, Taiwan
MingDao Univ, Surface Engn Res Ctr, Changhua, Taiwan MingDao Univ, Dept Mat Sci & Engn, Changhua, Taiwan
[40]
Low-temperature deposition and hardness enhancement of α-(Al,Cr)2O3 films by reactive high power pulsed magnetron sputtering
[J].
Cheng, Yitian
;
Chu, Chenglin
;
Zhou, Peng
.
MATERIALS RESEARCH EXPRESS,
2020, 7 (11)

Cheng, Yitian
论文数: 0 引用数: 0
h-index: 0
机构:
Shenzhen Polytech, Postdoctoral Innovat Practice Base, Inst Intelligent Mfg Technol, Shenzhen 518055, Peoples R China
Southeast Univ, Sch Mat Sci & Engn, Nanjing 210096, Peoples R China Shenzhen Polytech, Postdoctoral Innovat Practice Base, Inst Intelligent Mfg Technol, Shenzhen 518055, Peoples R China

Chu, Chenglin
论文数: 0 引用数: 0
h-index: 0
机构:
Southeast Univ, Sch Mat Sci & Engn, Nanjing 210096, Peoples R China Shenzhen Polytech, Postdoctoral Innovat Practice Base, Inst Intelligent Mfg Technol, Shenzhen 518055, Peoples R China

Zhou, Peng
论文数: 0 引用数: 0
h-index: 0
机构:
Shenzhen Polytech, Postdoctoral Innovat Practice Base, Inst Intelligent Mfg Technol, Shenzhen 518055, Peoples R China
Southern Univ Sci & Technol, Dept Mat Sci & Engn, Shenzhen, Peoples R China Shenzhen Polytech, Postdoctoral Innovat Practice Base, Inst Intelligent Mfg Technol, Shenzhen 518055, Peoples R China