Design for high-quality factor of piezoelectric-on-silicon MEMS resonators using resonant plate shape and phononic crystals

被引：24

作者：

Workie, Temesgen Bailie ^{[1
]}

Wu, Ting ^{[1
]}

Bao, Jing-Fu ^{[1
]}

Hashimoto, Ken-ya ^{[1
,2
]}

机构：

[1] Univ Elect Sci & Technol China, Sch Elect Sci & Engn, Chengdu 611731, Peoples R China

[2] Chiba Univ, Grad Sch Engn, Chiba, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2021年 / 60卷 / SD期

基金：

中国国家自然科学基金;

关键词：

36;

D O I：

10.35848/1347-4065/abe99a

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Piezoelectric-on-silicon MEMS resonator is very well known for its compatibility with CMOS integrated circuit technology. However, its quality factor (Q) is highly affected by acoustic energy loss through the supporting structures. In this study, a resonator with butterfly-like round edge resonating plate structure and deploying properly designed PnC arrays on the tether and the anchoring boundaries are proposed to scale up the quality factor by effectively reducing the energy loss. The finite element analysis simulation results reveal that the proposed topologies can efficiently change the displacement field in the resonating plate and reduce the anchor loss. Consequently, an unloaded quality factor (Q(u)) of the conventional resonator is raised from 29 899 to 51 503 (butterfly-like round edge resonating structure), 83 349 (Phononic crystal on the tether) and 83 899 (Phononic crystal on the anchor), representing 1.7 folds, 2.78 folds and 2.8 folds improvement respectively. (C) 2021 The Japan Society of Applied Physics

引用

页数：9

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